SEMI E39-0600 OBJECT SERVICES STANDARD CONCEPTS, BEHAVIOR

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1、SEMI E39 0600 SEMI 1995 20001 SEMI E39 0600 OBJECT SERVICES STANDARD CONCEPTS BEHAVIOR AND SERVICES This standard was technically approved by the Global Information to be published June 2000 Originally published in 1995 previously published June 1997 CONTENTS 1 Purpose 2 Scope 3 Referenced Documents

2、 4 Definitions 4 2Requirements 4 3Objects 4 4Services 4 5Data Type 5 Conventions 5 1OMT Object Information Model 5 2Object Attribute Representation 5 3Service Message Representation 6 Background 7 Applicable Documents 8 Basic Concepts and Behavior 8 2Object Attributes 8 2 3Use of Text 8 2 4Object Ty

3、pe 8 2 5Object Identifier 8 2 6Object Handle 8 3Object Definition 9 Object Relationships 9 2Object Hierarchy 9 3Scope and Ownership 9 4Multiple Inheritance Hierarchy 10 Additional Operations 10 2 Create and Delete 10 2 1Create 10 2 2Delete 10 3 Attachment 10 3 3Attach 10 3 4Attach Set Attributes 10

4、3 5Detach 10 3 6Reattach 10 3 7Attach Supervised Object 10 3 8Detach Supervised Object 11 Services and Scenarios 11 2 Scope 11 3 Filtering 11 4 Object Services Parameter Dictionary 11 5 Get and Set Attributes 11 6 GetType 11 7 GetAttrName 12 Additional Services 12 2 Object Services Parameter Diction

5、ary 12 3 Create 12 4 Delete 12 5 Attach 12 6 AttachSetAttr 12 7 Detach 12 8 Reattach 12 9 AttachSupervisedObject 12 10 DetachSupervisedObject 13 Applications 13 2 Get All of an Object s Attributes 13 3 Determine All Objects of a Specific Type and with Specific Characteristics 13 4 Determine Specific

6、 Attributes of a Specific Object Instance 13 5 Determine Types of Subordinate Objects SEMI E39 0600 SEMI 1995 20002 13 6 Determine Names of Attributes of Sub ordinate Objects 14 Requirements for Compliance 14 1 Fundamental Requirements 14 2 Additional Capabilities 14 2 1Filters 14 2 2Owner Objects 1

7、4 2 3Multiple Inheritance Hierarchy APPENDIX 1 A1 1 Overview of Object Terminology A1 2 Object Modeling Technique OMT Notation A1 2 1 Basic Notation A1 2 2 Associations A1 3 Generalization and Inheritance A1 3 1 Object Composition and Containment LIST OF TABLES Table 1 Top Object Attribute Definitio

8、n Table 2 Object Services Table 3 Object Services Parameter Dictionary Table 4 GetAttr Service Table 5 SetAttr Service Table 6 GetType Service Table 7 GetAttrName Service Table 8 Additional Object Services Table 9 Additional Object Services Parameter Dictionary Table 10 Create Service Table 11 Delet

9、e Service Table 12 Attach Service Table 13 AttachSetAttr Service Table 14 Detach Service Table 15 Reattach Service Table 16 AttachSupervisedObject Service Table 17 DetachSupervisedObject Service SEMI E39 0600 SEMI 1995 20003 SEMI E39 0600 OBJECT SERVICES STANDARD CONCEPTS BEHAVIOR AND SERVICES This

10、standard was technically approved by the Global Information to be published June 2000 Originally published in 1995 previously published June 1997 1 Purpose 1 1 The purpose of the Object Services Standard OSS is to provide general terminology conventions and notation for describing behavior and data

11、in terms of objects and object attributes In addition it provides basic services for reading object attributes setting their values and for asking for an object s contents This standard is intended to be referenced by other standards which define specific objects to reduce redundancy 2 Scope 2 1 The

12、 scope of this standard is to provide concepts behavior and services common to a variety of public objects 2 2 Object models are common to multiple standards Object Services provide basic object related definitions and basic services for getting object attributes and setting attribute values that ca

13、n be used by all standards defining public objects These services allow basic management of data based on objects 2 3 The object services defined in this document may be included in the services provided by other standards They may also be provided independently of such other standards 2 4 This stan

14、dard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 3 Referenced Standards 3 1 ISO Standard ISO

15、 95951 Common Management Information Service CMIS 3 2 Other Standards James Rumbaugh Michael Blaha William Premerlani Frederick Eddy William Lorensen Object Oriented Modeling and Design Englewood Cliffs New Jersey Prentice Hall 1991 1 ISO International Organization for Standardization C P 56 CH 1211

16、 Geneva 20 Switzerland NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standards 4 Definitions 4 1 The following basic definitions are provided in a logical order 4 2 Requirements 4 2 1 fundamental compliance conformance to all fundamental requirements for

17、 an object or service resource 4 2 2 fundamental requirements the requirements for information and behavior that must be satisfied for compliance with a standard Fundamental requirements apply to specific areas of application objects or services 4 3 Objects 4 3 1 object2 an entity with a specific se

18、t of data and behaviors Objects may be physical or conceptual 4 3 2 standardized object a object formally defined in SEMI standards and in compliance with the fundamental requirements of SEMI E39 Object Services Standard Concepts Behavior and Services 4 3 3 object model a static graphic model of obj

19、ects to show structure the identity of objects their attributes and operations and their relationships with one another 4 3 4 object type a formal classification of a group of similar objects Synonym object class Examples equipment wafer carrier 4 3 5 object instance an instance of an object type An

20、 object type is like a template while an object instance is the actual object Example an actual and specific optical stepper installed in a particular fab is an instance of the type Optical Stepper 4 3 6 object attribute attribute information concerning an object Examples for object type equipment m

21、anufacturer model serial number 2 The term object may refer to either an object class or an instance of a class SEMI E39 0600 SEMI 1995 20004 4 3 6 1 Attributes are classified in various ways according to their visibility public private optionality and access fundamental attribute an attribute that

22、is required for fundamental compliance with a standard service optional attribute an attribute that is required only in support of one or more optional standard services private attribute an attribute that is used strictly for internal purposes and is unknown invisible through public services public

23、 attribute an attribute that is known visible and whose current value is provided as a service to other entities upon request read only attribute RO may not be changed through public services read write attribute RW may be changed through public services 4 3 7 attribute name the formal name of the a

24、ttribute that is used to identify it The names and data types of public attributes are included with the object s definition and are unique for that object 4 3 8 object identifier a set of one or more items of information concerning a particular instance instantiation of an object of a given type th

25、at together uniquely distinguish that instance from all other instances of that object within a defined scope NOTE An object may have more than one identifier An identifier may be simple consist of only one attribute or complex consist of more than one attribute Example The combination of equipment

26、s manufacturer model and serial number serve as an identifier that uniquely identifies a specific installation 4 3 9 object handle a numeric or binary identifier assigned by an application for internal use NOTE A handle may also be available as a public attribute but cannot generally be guaranteed t

27、o be either persistent or unique outside of the current relationship between service user and service provider The persistence of the handle is specified by the standard that defines the object 4 3 10 operation a function performed by or inherent to an object Example for equipment run stop abort 4 3

28、 11 aggregation object an object that is composed made up of other objects An aggregation may lose some degree of integrity if one of its components is missing 4 3 12 component object an object that is part of an aggregation 4 3 13 container object an object that is intended to hold other types of o

29、bjects The contents may or may not be ordered 4 3 14 contents an object that is in a container Examples a wafer in a cassette a book in a library 4 3 15 owner object an object that is an aggregation container or supervisor of another object The owner object is said to own the other object 4 3 16 own

30、ed object an object that is a component of contained in or supervised by another object The owned object is said to be owned by the other object 4 3 16 1 An object may have multiple owners For example it may be a shared resource 4 4 Services 4 4 1 scope the specification of one or more objects that

31、starts with a specific owner object and proceeds downward through a hierarchical sequence of owns relationships 4 4 2 service or message service represents a function offered to a user by a provider A service consists of a sequence of service primitives each described by a list of parameters A servi

32、ce excludes definition of message structure and protocol 4 4 2 1 A service may or may not be processed by the provider of the service The invocation of some service may have to interact with other objects to fulfil its requirement completely an exception will be raised if the service can not fulfill

33、 all its pre or post conditions The object that provides the service may reject the service request or restrict the completion of the service to prevent an illegal action due to the equipment condition 4 4 3 notification service initiated by the service provider and sent to the service consumer subs

34、criber No response is expected 3 4 4 3 1 Notifications consist of two service primitives a message from the sender to the communications facility and an indication to the receiver from the communications facility 4 4 4 request service initiated by the service consumer Requests ask for data or for an

35、 activity operation from the provider Requests expect a specific response message 3 This does not preclude the implementation of a response message in the message protocol SEMI E39 0600 SEMI 1995 20005 4 4 4 1 A request consists of a message that requires a response from the receiver The primitives

36、for a request are the same as those of the notification while the response defines additional primitives called the response and the confirmation 4 4 5 service resource a logical group of one or more services within a specific area of functionality 4 5 Data Type 4 5 1 form type of data positive inte

37、ger unsigned integer integer enumerated boolean text formatted text structure list ordered list 4 5 2 positive integer may take the value of any positive whole number Messaging protocol may impose a limit on the range of possible values 4 5 3 unsigned integer may take the value of any positive integ

38、er or zero Messaging protocol may impose a limit on the range of possible values 4 5 4 integer may take on the value of any negative or unsigned integer Messaging protocol may impose a limit on the range of possible values 4 5 5 floating point may take on any single real numeric value positive or ne

39、gative Messaging protocol may impose a limit on the range of possible values 4 5 6 enumerated may take on one of a limited set of possible values These values may be given logical names but they may be represented by any single item data type 4 5 7 boolean may take on one of two possible values equa

40、ting to TRUE or FALSE 4 5 8 text A text string Messaging protocol may impose restrictions such as length or ASCII representation 4 5 9 formatted text a text string with an imposed format This could be by position by use of special characters or both 4 5 10 structure a complex structure consisting of

41、 a specific set of items of possibly mixed data types in a specified arrangement 4 5 11 list a set of one or more items that are all of the same form one of the above forms 4 5 12 ordered list a list for which the order in which items appear is significant 5 Conventions Defined terms are presented i

42、n boldface when introduced for the first time Formally reserved text strings such as attribute names are underlined 5 1 OMT Object Information Model The object models are presented using the Object Modeling Technique OMT developed by Rumbaugh James et al in Object Oriented Modeling and Design Prenti

43、ce Hall Englewood Cliffs NJ c1991 4 5 1 1 Overviews of this notation are provided in the Appendix A brief discussion of terminology is also provided in the Appendix 5 2 Object Attribute Representation The object information models for standardized objects will be supported by an attribute definition

44、 table with the following column headings Attribute NameDefinitionAccessRqmtForm The formal text name of the attribute Description of the information contained RO or RW Y or N see 4 4 5 2 1 The Access column uses RO Read Only or RW Read and Write to indicate the access that users of the service have

45、 to the attribute 5 2 2 A Y or N in the Requirement Reqt column indicates if this attribute must be supported in order to meet fundamental compliance for the service 5 2 3 The Form column is used to indicate the format of the attribute See Section 4 4 for definitions 5 3 Service Message Representati

46、on 5 3 1 Service Resource Definition A service resource definition table defines the specific set of messages for a given service group as shown in the following table Message Service NameTypeDescription Message nameN or RThe intent of the service 5 3 1 1 Type can be either N Notification or R Reque

47、st 5 3 1 2 Notification type messages are initiated by the service provider and the provider does not expect to get a response from the consumer subscriber 5 3 1 3 Request messages are initiated by a service consumer or subscriber Request messages ask for data or an activity from the provider Reques

48、t messages 4 For a full description of the Object Modeling Technique see Object Oriented Modeling and Design Rumbaugh Blaha Premerlani Eddy and Lorenson Prentice Hall 1991 SEMI E39 0600 SEMI 1995 20006 expect a specific response message no presumption on the message content 5 3 2 Service Parameter D

49、ictionary A service parameter dictionary table defines the parameters for one or more services as shown in the following table ParameterFormDescription Parameter XData typeA parameter called X is B in A 5 3 2 1 A row is provided in the table for each parameter of the service The first column contain

50、s the name of the parameter This is followed by columns describing the form and contents of the corresponding primitive 5 3 2 2 The Form column is used to indicate the type of data contained in a parameter See Section 4 4 for definitions 5 3 2 3 The Description column in the Service Parameter Dictio