SEMI E87.1-0301PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL

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1、SEMI E87 1 0301 SEMI 2000 20011 SEMI E87 1 0301 PROVISIONAL SPECIFICATION FOR SECS II PROTOCOL FOR CARRIER MANAGEMENT CMS This provisional specification was technically approved by the Global Information and Control Committee and is the direct responsibility of the North American Information and Con

2、trol Committee Current edition approved by the North American Regional Standards Committee on October 19 and November 22 2000 Initially available at www semi org December 2000 to be published March 2001 Originally published February 2000 previously published October 2000 1 Purpose 1 1 This document

3、maps the services and data of SEMI E87 to SECS II streams and functions and data definitions 2 Scope 2 1 This is a provisional specification covering equipment supporting automated access to load ports from the host point of view The provisional status is required because of the immaturity of implem

4、entations of integrated equipment with AMHS and additional specifications may yet be defined Also further exception handling and error recovery scenarios need to be defined 2 2 This document applies to all implementations of SEMI E87 that use the SECS II message protocol SEMI E5 Compliance to this s

5、tandard requires compliance to both SEMI E87 and SEMI E5 2 3 This standard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulator

6、y limitations prior to use 3 Limitations 3 1 This specification applies to semiconductor equipment with SEMI E15 1 compliant load ports It may also be applied to other manufacturing equipment that supports automated carrier transfer and or contains an internal buffer 3 2 This is a provisional specif

7、ication The following areas must be completed before the provisional status is removed 1 Any additional services or changes to existing services in Carrier Management must be mapped to SECS II messages 4 Referenced Standards 4 1 SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message

8、 Content SECS II SEMI 15 1 Provisional Specification for 300 mm Tool Load Port SEMI E39 1 SECS II Protocol for Object Services Standard OSS SEMI E87 Provisional Specification for Carrier Management CMS NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standa

9、rds 5 Services Mapping 5 1 This section shows the specific SECS II streams and functions that shall be used for SECS II imple mentation of the services defined in SEMI E87 as well as the parameter mapping for data attached to services 5 2 Services Message Mapping 5 2 1 Table 1 defines the relationsh

10、ips between SEMI E87 services and SECS II messages SEMI E87 1 0301 SEMI 2000 20012 Table 1 Services Message Mapping Table Service NameStream FunctionSECS II Message Name BindS3 F17 18Carrier Action Request Acknowledge CancelBindS3 F17 18Carrier Action Request Acknowledge CancelAllCarrierOutS3 F19 20

11、Cancel All Carrier Out Request Acknowledge CancelCarrierS3 F17 18Carrier Action Request Acknowledge CancelCarrierAtPortS3 F17 18Carrier Action Request Acknowledge CancelCarrierNotificationS3 F17 18Carrier Action Request Acknowledge CancelCarrierOutS3 F17 18Carrier Action Request Acknowledge CancelRe

12、servationAtPortS3 F25 26Port Action Request Acknowledge CarrierInS3 F17 18Carrier Action Request Acknowledge CarrierNotificationS3 F17 18Carrier Action Request Acknowledge CarrierOutS3 F17 18Carrier Action Request Acknowledge ChangeAccessS3 F23 24Port Group Action Request Acknowledge ChangeServiceSt

13、atusS3 F25 26Port Action Request Acknowledge DefinePortGroupS3 F21 22Port Group Definition Acknowledge DeletePortGroupS3 F23 24Port Group Action Request Acknowledge ProceedWithCarrierS3 F17 18Carrier Action Request Acknowledge ReserveAtPortS3 F25 26Port Action Request Acknowledge 5 3 Services Parame

14、ter Mapping 5 3 1 Table 2 maps the SEMI E87 service parameters to SECS II Data Items NOTE 2 Use of parameters not specified for a given message in SEMI E87 is prohibited SECS II data items not used for a given message shall be sent as zero length items Table 2 Service Parameters to SECS II Data Item

15、s Mapping Parameter NameRangeSECS II Data Item AccessModeEnumerated MANUAL AUTO PORTACCESS AttributeDataAnyCATTRDATA AttributeIDText format restrictions per SEMI E39 1 Section 6 CATTRID CarrierID1 to 64 charactersCARRIERSPEC CMAcknowledgeEnumeratedCAACK CMStatusStructureL 2 1 2 Status ErrorCodeEnume

16、ratedERRCODE ErrorText1 to 80 charactersERRTEXT PropertiesListNon identifier propertiesL n 1 L 2 1 2 n L 2 1 2 PortGroupID1 to 64 characters See SEMI E39 1 Section 6 for restrictions PORTGRPNAME PortIDU1 1 255 PTN SEMI E87 1 0301 SEMI 2000 20013 Parameter NameRangeSECS II Data Item PortListnumber of

17、 ports in groupL n 1 n ServiceStatusEnumerated IN SERVICE OUT OF SERVICE PORTACTION Statusn errorsL n 1 L 2 1 2 n 1 2 5 4 SECS II Data Items Without Corresponding SEMI E87 Parameters 5 4 1 Table 3 contains the SECS II data items that do not correspond to SEMI E87 s service parameter Table 3 Addition

18、al Data Item Requirements Table FunctionSECS II Data Item Used by S3 F17 to differentiate between Bind CancelCarrierOut CancelCarrierAtPort CancelBind CarrierIn ProceedWithCarrier CancelCarrierNotification and CarrierNotification services CARRIERACTION Used to satisfy SECS II conventions for linking

19、 a multi block inquiry with a subsequent multi block message Neither required nor specified by CMS DATAID Used to inform receiver of total message length size for SECS II multi block conventions Neither required nor specified by SEMI E87 DATALENGTH Used to satisfy SECS II multi block requirements Ne

20、ither required nor specified by SEMI E87 GRANT Used by S3 F23 to differentiate between port group related services PGRPACTION Used by S3 F25 to differentiate between port related CancelReservationAtPort and ReserveAtPort services PORTACTION 6 Variable Data Item Mapping 6 1 This section shows the spe

21、cific SECS II data classes and formats needed for SECS II implementations of SEMI E87 variable data items Table 4 Variable Data Item Mapping Table Variable NameClassFormat AccessModeDVVAL51 AccessModeiSV51 AvailPartitionCapacityDVVAL51 AvailPartitionCapacityiSV51 BufferCapacityListSVL n 1 n SEMI E87

22、 1 0301 SEMI 2000 20014 Variable NameClassFormat BufferPartitionInfoDVVALL 4 1 2 3 4 BufferPartitionInfoiSVL 4 1 2 3 4 CarrierIDDVVALA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 CarrierIDiSVA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6

23、 CarrierLocationMatrixSVL n 1 L 2 1 2 n L 2 1 2 LocationIDDVVALA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 LocationIDiSVA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 PartitionCapacityDVVAL51 PartitionCapacityiSV51 PartitionIDDVVALA 1

24、80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 PartitionIDiSVA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 PortStateInfoDVVALL 2 1 2 PortStateInfoiSVL 2 1 2 PortStateInfoListSVL n 1 n PartitionTypeDVVALA 1 64 PartitionTypeiSVA 1 64 PortAssoc

25、iationStateDVVALU1 PortAssociationStateiSVU1 PortAssociationStateListSVL n 1 n PortGroupDVVALL 3 SEMI E87 1 0301 SEMI 2000 20015 Variable NameClassFormat 1 2 3 PortGroupiSVL 3 1 2 3 PortGroupIDDVVALA 1 80 Conforms to restrictions of ObjID as specified in SEMI E39 1 Section 6 PortGroupIDiSVA 1 80 Con

26、forms to restrictions of ObjID as specified in SEMI E39 1 Section 6 PortGroupListSVL n 1 n PortIDDVVAL51 PortIDiSV51 PortListDVVALL n 1 n PortListiSVL n 1 n PortTransferStateDVVAL51 PortTransferStateiSV51 PortTransferStateListSVL n 1 n UnAllocatedPartitionCapacityDVVAL51 UnAllocatedPartitionCapacity

27、iSV51 NOTICE SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any particular application The determination of the suitability of the standard is solely the responsibility of the user Users are cautioned to refer to manufacturer s instructions pro

28、duct labels product data sheets and other relevant literature respecting any materials mentioned herein These standards are subject to change without notice The user s attention is called to the possibility that compliance with this standard may require use of copy righted material or of an inventio

29、n covered by patent rights By publication of this standard SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this standard Users of this standard are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility Copyright by SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose CA 95134 Reproduction of the contents in whole or in part is forbidden without express written consent of SEMI