SEMI E47.1-0301 PROVISIONAL MECHANICAL SPECIFICATION FOR BOXES

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1、SEMI E47 1 0301 SEMI 1997 20011 SEMI E47 1 0301 PROVISIONAL MECHANICAL SPECIFICATION FOR BOXES AND PODS USED TO TRANSPORT AND STORE 300 mm WAFERS This specification was technically approved by the Global Physical Interfaces to be published March 2001 Originally published in 1997 previously published

2、 February 2000 1 Purpose 1 1 This standard partially specifies the boxes and pods used to transport and store 300 mm wafers which may or may not be in removable cassettes in an IC manufacturing facility 2 Scope 2 1 This standard is intended to set an appropriate level of specification that places mi

3、nimal limits on innovation while ensuring modularity and interchange ability at all mechanical interfaces Most of the require ments given in this specification are in the form of max imum or minimum dimensions with very few required surfaces Only the physical interfaces other than the door mechanism

4、 and kinematic couplings for boxes and pods are specified no materials requirements or micro contamination limits are given The enclosure specified in this standard can be a sealed minienviron ment but it could also just be a box with well defined interfaces 2 2 The box has the following components

5、and sub components Key Required feature Optional feature top top handling flange center hole on top handling flange 3 kinematic grooves on top handling flange optional interior cassette removable or non removable with supports for 13 or 25 wafers wafer capture mechanism 2 end effector exclusion zone

6、s sides 2 side fork lift flanges optional 4 side conveyor rails bottom opening only optional ergonomic manual handles optional door on the bottom or front holes for latch keys that lock the door to the FIMS interface when the door is unlatched from the box front opening only holes for registration p

7、ins door sensing pads front opening only bottom 4 bottom conveyor rails with the bottom of the front seal zone acting as the fourth rail and the rear rail optional in the front opening box 2 fork lift pin holes front opening only 5 carrier sensing pads center retaining feature front opening only fro

8、nt retaining feature front opening only 4 info pads 2 advancing box sensing pads front opening only 3 features that mate with kinematic coupling pins and provide a 10 mm lead in 3 features that mate with kinematic coupling pins and provide a 15 mm lead in optional 2 3 This standard is provisional be

9、cause of concerns about the kinematic coupling pins causing excessive wear on carriers and the usefulness of the robotic handling flanges and conveyor rails Once box testing is done this standard should be modified and upgraded from provisional status 2 4 This standard does not purport to address sa

10、fety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use SEMI E47 1 0301 SEMI 1997 20012 3 Referenced Standards 3 1 SEMI Standards SEMI

11、 E1 9 Provisional Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E15 1 Provisional Specification for 300 mm Tool Load Port SEMI E19 Standard Mechanical Interface SMIF SEMI E19 5 Specification for 300 mm Bottom Opening S

12、tandard Mechanical Interface SMIF SEMI E44 Guide for Procurement and Acceptance of Minienvironments SEMI E47 Specification for 150 mm 200 mm Pod Handles 150 mm and 200 mm SMIF Pod Handles SEMI E57 Provisional Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Car

13、riers SEMI E62 Provisional Specification for 300 mm Front Opening Interface Mechanical Standard FIMS SEMI S8 Safety Guidelines for Ergonomics Human Factors Engineering of Semiconductor Manufacturing Equipment NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted

14、 standards 4 Terminology 4 1 bilateral datum plane a vertical plane that bi sects the wafers and that is perpendicular to both the horizontal and facial datum planes as defined in SEMI E57 4 2 box a protective portable container for a cassette and or substrate s as defined in SEMI E44 4 3 carrier ca

15、pacity the number of substrates that a carrier holds as defined in SEMI E1 9 4 4 cassette an open structure that holds one or more substrates as defined in SEMI E44 4 5 facial datum plane a vertical plane that bisects the wafers and that is parallel to the front side of the carrier where wafers are

16、removed or inserted On tool load ports it is also parallel to the load face plane specified in SEMI E15 on the side of the tool where the carrier is loaded and unloaded as defined in SEMI E57 4 6 front opening unified pod FOUP a box that complies with SEMI E47 1 with a non removable cassette so that

17、 its interior complies with SEMI E1 9 and with a front opening interface that mates with a FIMS port that complies with SEMI E62 4 7 horizontal datum plane a horizontal plane from which projects the kinematic coupling pins on which the carrier sits On tool load ports it is at the load height specifi

18、ed in SEMI E15 and might not be physic ally realized as a surface as defined in SEMI E57 4 8 minienvironment a localized environment created by an enclosure to isolate the product from contamination and people as defined in SEMI E44 4 9 nominal wafer center line the line that is defined by the inter

19、section of the two vertical datum planes facial and bilateral and that passes through the nominal centers of the seated wafers which must be horizontal when the carrier is placed on the coupling as defined in SEMI E57 4 10 pod a box having a Standard Mechanical Int erface SMIF per SEMI E19 as define

20、d in SEMI E44 4 11 robotic handling flanges horizontal projec tions on the top of the box for lifting and rotating the box 4 12 wafer carrier any cassette box pod or boat that contains wafers as defined in SEMI E15 5 Ordering Information 5 1 Intended Use This standard is intended to specify 300 mm b

21、oxes over a reasonable lifetime of use not just those in new condition For this reason the purchaser needs to specify a time period and the number and type of uses to which the boxes will be put It is under these conditions that the boxes must remain in compliance with the requirements listed in Sec

22、tion 6 5 2 Temperature Ranges The purchaser of 300 mm boxes needs to specify two sets of temperatures to which the boxes might be exposed An operating temp erature range is the set of environmental temperatures in which the boxes will remain in compliance with the requirements listed in Section 6 A

23、temporary temper ature range is the set of environmental temperatures to which the boxes can be exposed such that when the boxes return to the operating temperature range the boxes will be in compliance with the requirements listed in Section 6 Limits on exposure times to elevated temperatures shoul

24、d be specified Also the purchaser needs to specify a range of temperatures for the wafers and cassettes that might be inserted in the boxes if the cassettes are removable 5 3 Fire Resistance The purchaser of 300 mm box es may need to consider the flammability of the boxes 5 4 Front End vs Back End o

25、f Line The purchaser of 300 mm carriers needs to specify whether they are to SEMI E47 1 0301 SEMI 1997 20013 be used in the front end of line FEOL part of the fabrication process the back end of line BEOL part of the fabrication process or both 6 Requirements 6 1 External Kinematic Couplings The phy

26、sical alignment mechanism from the cassette to the box if the cassette is removable and from the box to the tool load port or a nest on a vehicle or in a stocker consists of features not specified in this standard on the top entity that mate with three or six pins underneath as defined in SEMI E57 M

27、ost of the dimensions of the box are determined with respect to the three orthogonal datum planes defined in that standard the horizontal datum plane the facial datum plane and the bilateral datum plane All of the dimensions for the box are bilaterally symmetric about both the bilateral and facial d

28、atum planes with the following exceptions The features that mate with the kinematic coupling pins and the box sensing pads are symmetrical only about the bilateral datum plane The front opening box has a door only on the front and conveyor rails on the left and right sides that are required to exten

29、d all the way to the front The orientation notches on the robotic handling flange are different for each of the four sides The three features that mate with the kinematic coup ling pins must provide a lead in capability that corrects a box misalignment of up to r69 in any horizontal direction 6 2 In

30、ternal Kinematic Couplings If the cassette is removable the horizontal position of each of the three primary kinematic coupling pins on the inside bottom of the box must be within r62 of the horizontal positions of the corresponding pin on which the box is set so that the vertical datum planes defin

31、ed by the two sets of kinematic couplings must be nearly identical Each of the three pins on the inside bottom of the box must be z44 higher than the corresponding pin on which the box is set so that the horizontal datum planes defined by the two sets of kinematic couplings will be parallel and sepa

32、rated by dimension z44 6 3 Nonremovable Cassettes If the cassette is non removable there need not be a kinematic coupling be tween the box and cassette However the interior of such a box must have the interior dimensions of the cas sette specified in SEMI E1 9 Many of these dimensions are measured f

33、rom a horizontal datum plane so an internal horizontal datum plane is still specified to be z44 above the horizontal datum plane under the box 6 4 Door There are two options for the location of the box door 6 4 1 In the Bottom Opening Door Option the box door is on the bottom of the box so the door

34、is parallel to the wafers and the horizontal datum plane and the door and its frame must be designed to mate with a port that conforms to SEMI E19 5 6 4 2 In the Front Opening Door Option the box door is on the front side of the box corresponding to the front side of the cassette where wafers are ac

35、cessed so the door is perpendicular to the wafers and parallel to the facial datum plane and the door and its frame must be designed to mate with a port that conforms to SEMI E62 Specifically the box door and its frame must have sur faces that mate with the seal zones and the reserved spaces for vac

36、uum application which includes all of the circles bounded by r38 except for the holes for the registration pins at the center of each circle defined in Sections 5 3 and 5 6 of SEMI E62 These box door and frame surfaces must be a distance of y33 from the facial datum plane where r38 and y33 are speci

37、fied in SEMI E62 and must have a flatness of y42 The door of the front opening box must also be designed so that when the box is pressed against the FIMS port both latch keys on the port are inserted to their full length Furthermore when the latch keys are turned more than 45 toward the position tha

38、t unlocks the box door from the box the latch key holes on the door must be such that the door is not removable from the latch keys 6 5 Wafer Capture and Centering When the box is closed the cassette and the wafers must be captured in the box to prevent movement during transport Wafer capture must i

39、nclude gently pushing the wafers to the rear of the cassette to center them 6 6 Internal Dimensions If the cassette is remova ble the interior of the box other than the kinematic coupling pins or the devices to capture the cassette and the wafers must not intrude on any of the cassette do mains defi

40、ned in SEMI E1 9 Furthermore the cassette must have a clearance of at least r68 in any direction while it is being inserted into the box The interior of any front opening box must also not intrude on the end effector exclusion zone and the inside of the door must not intrude more that y51 toward the

41、 facial datum plane If the cassette is not removable the interior of the box between y11 and the door opening must not protrude higher than z6 above the internal horizontal datum plane and lower than z15 above the top nominal wafer plane Horizontally it must not protrude closer to the bilateral datu

42、m plane than x51 between y11 and y49 or closer than x52 between y49 and y52 as shown in Fig ure 10 Dimensions x51 x52 y49 and y52 are speci fied in Table 1 and y11 z6 and z15 are specified in SEMI E1 9 6 7 External Dimensions Figures 1 through 4 re spectively show the side view rear view top view an

43、d SEMI E47 1 0301 SEMI 1997 20014 bottom view for the bottom opening box and Figures 5 through 8 show the same views of the front opening box Table 1 defines all of the dimensions In this and following figures the heaviest lines are used for surfaces that have tolerances not surfaces that have only

44、maximum or only minimum dimensions If a box identification tag is used it must be located at the bottom rear centered on the bilateral datum plane and must be contained within the maximum outer dimensions of the box facial datum plane numbers in parentheses are for 25 wafer cassettes if different nu

45、mbers in square brackets are for removable cassettes if different y46 71 1 y44 53 z49 8 z48 15 y52 205 z59 72 z47 210 330 233 353 1 z41 0 y57 189 z43 2 1 z44 11 0 25 0 05 side rail optional y58 75 horizontal datum plane of box nest or load port horizontal datum plane inside box bottom rail y55 195 y

46、56 194 75 0 25 at bottom rail y53 205 y54 204 75 0 25 at side rail z46 60 1 Figure 1 Side View of Bottom Opening Box SEMI E47 1 0301 SEMI 1997 20015 numbers in parentheses are for 25 wafer cassettes if different numbers in square brackets are for removable cassettes if different z59 72 bilateral dat

47、um plane z47 210 330 233 353 1 x46 71 1 x44 53 z49 8 z48 15 z41 0 x57 189 z43 2 1 z44 11 0 25 0 05 side rail optional x58 75 horizontal datum plane of box nest or load port horizontal datum plane inside box bottom rail x55 195 x56 194 75 0 25 at bottom rail x53 205 x54 204 75 0 25 at side rail z46 6

48、0 1 Figure 2 Rear View of Bottom Opening Box y52 205 x53 205 facial datum plane bilateral datum plane y53 205 front side of the cassette and box where wafers are accessed robotic handling flange see Figure 12 Figure 3 Top View of Bottom Opening Box SEMI E47 1 0301 SEMI 1997 20016 y58 75 y52 205 faci

49、al datum plane bilateral datum plane x58 75 y53 205 y54 204 75 0 25 at optional front and rear rails y55 195 y56 194 75 0 25 at bottom rail 8x 45 0 5 x55 195 x56 194 75 0 25 at bottom rail x57 189 x53 205 x54 204 75 0 25 at side rail x59 199 3 1 y57 189 y59 199 3 1 front side of the cassette and box

50、 where wafers are accessed bottom rail side rail optional Figure 4 Bottom View of Bottom Opening Box z67 79 5 z66 55 5 z68 133 5 253 5 z69 157 5 277 5 y60 155 facial datum plane horizontal datum plane of box nest or load port horizontal datum plane inside box z41 0 y53 190 y56 189 75 0 25 at bottom