SEMI E5-0301 SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT

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1、SEMI E5 0301 SEMI 1982 20011 SEMI E5 0301 SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT SECS II This standard was technically approved by the Global Information to be published March 2001 Originally published in 1982 previously published October 2000 NOTICE The user s attention is called

2、to the possibility that some implementations of this standard particularly those related to the use of Stream 4 may involve the use of inventions covered by U S patents 4 884 674 and 5 216 613 and by other patents issued or pending held by Texas Instruments Incorporated By publication of this standa

3、rd SEMI takes no position respecting either the applicability or the validity of these or other patent rights asserted in connection with any item mentioned in this standard Users of this standard are expressly advised that determination of any such patent rights and the risk of infringement of such

4、 rights are entirely their own responsibility CONTENTS 1 Introduction 1 1 Intent 1 2 Overview 1 3 Application 1 4 Applicable Documents 2 Selected Definitions 3 The Message Transfer Protocol 3 1 Intent 3 2 Messages 3 2 Blocking Requirements 3 2 Message Header 3 2 The Transaction Timeout 3 2 Multiple

5、Open Transaction 4 Streams and Functions 4 1 Streams 4 2 Functions 4 3 Stream and Function Allocation 5 Transaction and Conversation Protocols 5 1 Intent 5 2 Transaction Definition 5 3 Transaction Level Requirements 5 4 Conversation Protocols 6 Data Structures 6 1 Intent 6 2 Item 6 3 List 6 4 Locali

6、zed Character String Items 6 5 Example Data Structures 6 6 Data Item Dictionary 6 7 Variable Item Dictionary 6 8 Object Dictionary 7 Message Detail 7 1 Intent 7 4 Stream 0 and Function 0 7 5 Stream 1 Equipment Status S1 F0 Abort Transaction S1F0 S1 F1 Are You There Request R S1 F2 On Line Data D S1

7、F3Selected Equipment Status Request SSR S1 F4Selected Equipment Status Data SSD S1 F5Formatted Status Request FSR S1 F6Formatted Status Data FSD S1 F7Fixed Form Request FFR S1 F8Fixed Form Data FFD S1 F9Material Transfer Status Request TSR S1 F10 Material Transfer Status Data TSD S1 F11 Status Varia

8、ble NameList Request SVNR S1 F12 Status Variable NameList Reply SVNRR S1 F13 Establish Communications Request CR S1 F14 Establish Communications Request Acknowledge CRA S1 F15 Request OFF LINE ROFL S1 F16 OFF LINE Acknowledge OFLA S1 F17 Request ON LINE RONL S1 F18 ON LINE Acknowledge ONLA Macro Lev

9、el Messages S1 F19 Get Attribute GA S1 F20 Attribute Data AD 7 6 Stream 2 Equipment Control and Diagnostics S2 F0Abort Transaction S2F0 S2 F1Service Program Load Inquire SPI S2 F2Service Program Load Grant SPG S2 F3Service Program Send SPS S2 F4Service Program Send Acknowledge SPA S2 F5Service Progr

10、am Load Request SPR SEMI E5 0301 SEMI 1982 20012 S2 F6Service Program Load Data SPD S2 F7Service Program Run Send CSS S2 F8Service Program Run Acknowledge CSA S2 F9Service Program Results Request SRR S2 F10 Service Program Results Data SRD S2 F11 Service Program Directory Request SDR S2 F12 Service

11、Program Directory Data SDD S2 F13 Equipment Constant Request ECR S2 F14 Equipment Constant Data ECD S2 F15 New Equipment Constant Send ECS S2 F16 New Equipment Constant Acknowledge ECA S2 F17 Date and Time Request DTR S2 F18 Date and Time Data DTD S2 F19 Reset Initialize Send RIS S2 F20 Reset Acknow

12、ledge RIA S2 F21 Remote Command Send RCS S2 F22 Remote Command Acknowledge RCA S2 F23 Trace Initialize Send TIS S2 F24 Trace Initialize Acknowledge TIA S2 F25 Loopback Diagnostic Request LDR S2 F26 Loopback Diagnostic Data LDD S2 F27 Initiate Processing Request IPR S2 F28 Initiate Processing Acknowl

13、edge IPA S2 F29 Equipment Constant Namelist Request ECNR S2 F30 Equipment Constant Namelist ECN S2 F31 Date and Time Set Request DTS S2 F32 Date and Time Set Acknowledge DTA S2 F33 Define Report DR S2 F34 Define Report Acknowledge DRA S2 F35 Link Event Report LER S2 F36 Link Event Report Acknowledge

14、 LERA S2 F37 Enable Disable Event Report EDER S2 F38 Enable Disable Event Report Acknowledge EERA S2 F39 Multi block Inquire DMBI S2 F40 Multi block Grant DMBG S2 F41 Host Command Send HCS S2 F42 Host Command Acknowledge HCA S2 F43 Reset Spooling Streams and Functions RSSF S2 F44 Reset Spooling Ackn

15、owledge RSA S2 F45 Define Variable Limit Attributes DVLA S2 F46 Variable Limit Attribute Acknowledge VLAA S2 F47 Variable Limit Attribute Request VLAR S2 F48 Variable Limit Attribute Send VLAS S2 F49 Enhanced Remote Command S2 F50 Enhanced Remote Command Acknowledge 7 7 Stream 3 Material Status S3 F

16、0Abort Transaction S3F0 S3 F1Material Status Request MSR S3 F2Material Status Data MSD S3 F3Time to Completion Request TCR S3 F4Time to Completion Data TCD S3 F5Material Found Send MFS S3 F6Material Found Acknowledge MFA S3 F7Material Lost Send MLS S3 F8Material Lost Acknowledge MLA S3 F9Material ID

17、 Equate Send IES S3 F10 Material ID Equate Acknowledge IEA S3 F11 Material ID Request MIDR S3 F12 Material ID Request Acknowledge MIRA S3 F13 Material ID Send MIS S3 F14 Material ID Acknowledge MIA S3 F15 Materials Multi Block Inquire MMBI S3 F16 Materials Multi Block Grant MMBG S3 F17 Carrier Actio

18、n Request S3 F18 Carrier Action Acknowledge S3 F19 Cancel All Carrier Out Request S3 F20 Cancel All Carrier Out Acknowledge S3 F21 Port Group Definition S3 F22 Port Group Definition Acknowledge S3 F23 Port Group Action Request S3 F24 Port Group Action Acknowledge S3 F25 Port Action Request S3 F26 Po

19、rt Action Acknowledge 7 8 Stream 4 Material Control S4 F0Abort Transaction S4F0 S4 F1Ready to Send Material RSN S4 F2Ready to Send Acknowledge RSA S4 F3Send Material SMN S4 F4Not Used S4 F5Handshake Complete HCN S4 F6Not Used S4 F7Not Ready to Send ABN S4 F8Not Used S4 F9Stuck in Sender SSN S4 F10 N

20、ot Used S4 F11 Stuck in Receiver SRN S4 F12 Not Used S4 F13 Send Incomplete Timeout SIN S4 F14 Not Used S4 F15 Material Received MRN S4 F16 Not Used S4 F17 Request to Receive RTR S4 F18 Request to Receive Acknowledge RRA Macro Level Messages S4 F19 Transfer Job Create TJ S4 F20 Transfer Job Acknowle

21、dge TJA S4 F21 Transfer Job Command TJC S4 F22 Transfer Command Acknowledge TCA S4 F23 Transfer Job Alert TJA SEMI E5 0301 SEMI 1982 20013 S4 F24 Transfer Alert Acknowledge TLA S4 F25 Multi Block Inquire MBI4 S4 F26 Multi Block Grant MBG4 Micro Level Messages S4 F27 Handoff Ready HR S4 F28 Not Used

22、S4 F29 Handoff Command HC S4 F30 Not Used S4 F31 Handoff Command Complete HCC S4 F32 Not Used S4 F33 Handoff Verify HV S4 F34 Not Used S4 F35 Handoff Cancel Ready HCR S4 F36 Not Used S4 F37 Handoff Cancel Ready Acknowledge HCA S4 F38 Not Used S4 F39 Handoff Halt HH S4 F40 Not Used S4 F41 Handoff Hal

23、t Acknowledge HHA S4 F42 Not Used 7 9 Stream 5 Exception Handling S5 F0Abort Transaction S5F0 S5 F1Alarm Report Send ARS S5 F2Alarm Report Acknowledge ARA S5 F3Enable Disable Alarm Send EAS S5 F4Enable Disable Alarm Acknowledge EAA S5 F5List Alarms Request LAR S5 F6List Alarm Data LAD S5 F7List Enab

24、led Alarm Request LEAR S5 F8List Enabled Alarm Data LEAD S5 F9Exception Post Notify EXPN S5 F10 Exception Post Confirm EXPC S5 F11 Exception Clear Notify EXCN S5 F12 Exception Clear Confirm EXCC S5 F13 Exception Recover Request EXRR S5 F14 Exception Recover Acknowledge EXRA S5 F15 Exception Recovery

25、 Complete Notify EXRCN S5 F16 Exception Recovery Complete Confirm EXRCC S5 F17 Exception Recovery Abort Request EXRAR S5 F18 Exception Recovery Abort Acknowledge EXRAA 7 10 Stream 6 Data Collection S6 F0Abort Transaction S6F0 S6 F1Trace Data Send TDS S6 F2Trace Data Acknowledge TDA S6 F3Discrete Var

26、iable Data Send DVS S6 F4Discrete Variable Data Acknowledge DVA S6 F5Multi block Data Send Inquire MBI S6 F6Multi block Grant MBG S6 F7Data Transfer Request DDR S6 F8Data Transfer Data DDD S6 F9Formatted Variable Send FVS S6 F10 Formatted Variable Acknowledge FVA S6 F11 Event Report Send ERS S6 F12

27、Event Report Acknowledge ERA S6 F13 Annotated Event Report Send AERS S6 F14 Annotated Event Report Acknowledge AERA S6 F15 Event Report Request ERR S6 F16 Event Report Data ERD S6 F17 Annotated Event Report Request AERR S6 F18 Annotated Event Report Data AERD S6 F19 Individual Report Request IRR S6

28、F20 Individual Report Data IRD S6 F21 Annotated Individual Report AIR S6 F22 Annotated Individual Report Data AIRD S6 F23 Request Spooled Data RSD S6 F24 Request Spooled Data Acknowledgement Send RSDAS S6 F25 Notification Report Send S6 F26 Notification Report Send Acknowledge S6 F27 Trace Report Se

29、nd TRS S6 F28 Trace Report Send Acknowledge TRSA S6 F29 Trace Report Request TRR S6 F30 Trace Report Data TRD 7 11 Stream 7 Process Program Management S7 F0Abort Transaction S7F0 S7 F1Process Program Load Inquire PPI S7 F2Process Program Load Grant PPG S7 F3Process Program Send PPS S7 F4Process Prog

30、ram Acknowledge PPA S7 F5Process Program Request PPR S7 F6Process Program Data PPD S7 F7Process Program ID Request PIR S7 F8Process Program ID Data PID S7 F9M P M Request MMR S7 F10 M P M Data MMD S7 F11 M P M Update Send UMS S7 F12 M P M Update Acknowledge UMA S7 F13 Delete M P M Entry Send DES S7

31、F14 Delete M P M Entry Acknowledge DEA S7 F15 Matrix Mode Select Send MMS S7 F16 Matrix Mode Select Acknowledge MMA S7 F17 Delete Process Program Send DPS S7 F18 Delete Process Program Acknowledge DPA S7 F19 Current EPPD Request RER SEMI E5 0301 SEMI 1982 20014 S7 F20 Current EPPD Data RED S7 F21 Eq

32、uipment Process Capabilities Request PCR S7 F22 Equipment Process Capabilities Data PCD S7 F23 Formatted Process Program Send FPS S7 F24 Formatted Process Program Acknowledge FPA S7 F25 Formatted Process Program Request FPR S7 F26 Formatted Process Program Data FPD S7 F27 Process Program Verificatio

33、n Send PVS S7 F28 Process Program Verification Acknowledge PVA S7 F29 Process program Verification Inquire PVI S7 F30 Process Program Verification Grant PVG S7 F31 Verification Request Send VRS S7 F32 Verification Request Acknowledge VRA S7 F33 Process Program Available Request PAR S7 F34 Process Pr

34、ogram Availability Data PAD S7 F35 Process Program for MID Request PPMR S7 F36 Process Program for MID Data PPMD 7 12 Stream 8 Control Program Transfer S8 F0Abort Transaction S8F0 S8 F1Boot Program Request BPR S8 F2Boot Program Data BPD S8 F3Executive Program Request EPR S8 F4Executive Program Data

35、EPD 7 13 Stream 9 System Errors S9 F0Abort Transaction S9F0 S9 F1Unrecognized Device ID UDN S9 F2Not Used S9 F3Unrecognized Stream Type USN S9 F4Not Used S9 F5Unrecognized Function Type UFN S9 F6Not Used S9 F7Illegal Data IDN S9 F8Not Used S9 F9Transaction Timer Timeout TTN S9 F10 Not Used S9 F11 Da

36、ta Too Long DLN S9 F12 Not Used S9 F13 Conversation Timeout CTN S9 F14 Not Used 7 14 Stream 10 Terminal Services S10 F0 Abort Transaction S10F0 S10 F1 Terminal Request TRN S10 F2 Terminal Request Acknowledge TRA S10 F3 Terminal Display Single VTN S10 F4 Terminal Display Single Acknowledge VTA S10 F5

37、 Terminal Display Multi block VTN S10 F6 Terminal Display Multi block Acknowledge VMA S10 F7 Multi block Not Allowed MNN S10 F8 Not Used S10 F9 Broadcast BCN S10 F10 Broadcast Acknowledge BCA 7 15 Stream 11 Host File Services Deleted 7 16 Stream 12 Wafer Mapping S12 F0Abort Transaction S12F0 S12 F1M

38、ap Set Up Data Send MSDS S12 F2Map Set up Data Acknowledge MSDA S12 F3Map Set up Data Request MSDR S12 F4Map Set up Data MSD S12 F5Map Transmit Inquire MAPTI S12 F6Map Transmit Grant MAPTG S12 F7Map Data Send Type 1 MDS1 S12 F8Map Data Acknowledge Type 1 MDA1 S12 F9Map Data Send Type 2 MDS2 S12 F10M

39、ap Data Acknowledge Type 2 MDA2 S12 F11Map Data Send Type 3 MDS3 S12 F12Map Data Acknowledge 3 MDA3 S12 F13Map Data Request Type 1 MDR1 S12 F14Map Data Type 1 MD1 S12 F15Map Data Request Type 2 MDR2 S12 F16Map Data Type 2 MD2 S12 F17Map Data Request Type 3 MDR3 S12 F18Map Data Type 3 MD3 S12 F19Map

40、Error Report Send MERS S12 F20Not Used 7 17 Stream 13 Data Set Transfers S13 F0Abort Transaction S13F0 S13 F1Send Data Set Send DSSS S13 F2Send Data Set Acknowledge DSSA S13 F3Open Data Set Request DSOR S13 F4Open Data Set Data DSOD S13 F5Read Data Set Request DSRR S13 F6Read Data Set Data DSRD S13

41、F7Close Data Set Send DSCS S13 F8Close Data Set Acknowledge DSCA S13 F9Reset Data Set Send DSRS S13 F10Reset Data Set Acknowledge DSRA S13 F11Data Set Object Multi Block Inquire DSOMGI S13 F12Data Set Object Multi Block Grant DSOMBG S13 F13Table Data Send TDS SEMI E5 0301 SEMI 1982 20015 S13 F14Tabl

42、e Data Acknowledge TDA S13 F15Table Data Request TDR S13 F16Table Data TD 7 18 Stream 14 Object Services S14 F0Abort Transaction S14F0 S14 F1GetAttr Request GAR S14 F2GetAttr Data GAD S14 F3SetAttr Request SAR S14 F4SetAttr Data SAD S14 F5GetType Request GTR S14 F6GetType Data GTD S14 F7GetAttrName

43、Request GANR S14 F8GetAttrName Data GAND S14 F9Create Object Request COR S14 F10Create Object Acknowledge CAO S14 F11Delete Object Request S14 F12Delete Object Acknowledge DOA S14 F13Object Attach Request OAR S14 F14Object Attach Acknowledge OAA S14 F15Attached Object Action Request AOAR S14 F16Atta

44、ched Object Action Acknowledge AOAA S14 F17Supervised Object Action Request SOAR S14 F18Supervised Object Action Acknowledge SOAA S14 F19Generic Service Request GSR S14 F20Generic Service Acknowledge GSA S14 F21Generic Service Completion Information GSCI S14 F22Generic Service Completion Acknowledge

45、 GSCA S14 F23Multi block Generic Service Data Inquire GSDI S14 F24Multi block Generic Service Data Grant GSDG S14 F25Get Service Name Request GSNR S14 F26Get Service Name Data GSND S14 F27Get Service Parameter Name Request GPNR S14 F28Get Service Parameter Name Request GPND 7 19 Stream 15 Recipe Man

46、agement S15 F0Abort Transaction S15F0 S15 F1Recipe Management Multi block Inquire S15 F2Recipe Management Multi block Grant S15 F3Recipe Namespace Action Request S15 F4Recipe Namespace Action Acknowledge S15 F5Recipe Namespace Rename Request S15 F6Recipe Namespace Rename Acknowledge S15 F7Recipe Spa

47、ce Request S15 F8Recipe Space Data S15 F9Recipe Status Request S15 F10Recipe Status Data S15 F11Recipe Version Request S15 F12Recipe Version Data S15 F13Recipe Create Request S15 F14Recipe Create Acknowledge S15 F15Recipe Store Request S15 F16Recipe Store Acknowledge S15 F17Recipe Retrieve Request S

48、15 F18Recipe Retrieve Data S15 F19Recipe Rename Request S15 F20Recipe Rename Acknowledge S15 F21Recipe Action Request S15 F22Recipe Action Acknowledge S15 F23Recipe Descriptor Request S15 F24Recipe Descriptor Data S15 F25Recipe Parameter Update Request S15 F26Recipe Parameter Update Acknowledge S15

49、F27Recipe Download Request S15 F28Recipe Download Acknowledge S15 F29Recipe Verify Request S15 F30Recipe Verify Acknowledge S15 F31Recipe Unload Request S15 F32Recipe Unload Data S15 F33Recipe Select Request S15 F34Recipe Select Acknowledge S15 F35Recipe Delete Request S15 F36Recipe Delete Acknowled

50、ge S15 F37DRNS Segment Approve Action Request S15 F38DRNS Segment Approve Action Acknowledge S15 F39DRNS Recorder Segment Request S15 F40DRNS Recorder Segment Acknowledge S15 F41DRNS Recorder Modify Request S15 F42DRNS Recorder Modify Acknowledge S15 F43DRNS Get Change Request S15 F44DRNS Get Change