SEMI E94-1000PROVISIONAL SPECIFICATION FOR CONTROL JOB MANAGEMENT

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1、SEMI E94 1000 SEMI 20001 SEMI E94 1000 PROVISIONAL SPECIFICATION FOR CONTROL JOB MANAGEMENT This provisional specification was technically approved by the Global Information and Control Committee and is the direct responsibility of the North American Information and Control Committee Current edition

2、 approved by the North American Regional Standards Committee on July 14 and August 28 2000 Initially available at www semi org September 2000 to be published October 2000 Originally published February 2000 1 Purpose 1 1 This specification describes equipment provided services to the factory that sup

3、ports a high level of factory automation These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment 2 Scope 2 1 This specification may be applied to equipment that is compliant to SEMI E30 GEM However it is also intended that this s

4、tandard will be useful for future generation equipment interfaces that supercede SEMI E30 such as SEMI E53 2 2 This standard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health prac

5、tices and determine the applicability of regulatory limitations prior to use 3 Limitations 3 1 This standard presents a model of the ControlJob The model delineates the services messages and behavior of the ControlJob The model is protocol independent Thus an ancillary standard must be selected in o

6、rder to provide a complete implementation 3 2 This standard should not be applied to non production equipment such as material transport systems or facilities environmental controllers 3 3 Provisional Status 3 3 1 For this standard specification to be complete removal of provisional status the follo

7、wing areas need to be completed 1 ControlJob to assure equivalent processing regardless of module used in multi module equipment 2 Complete specification of relationship to Carrier Management 3 Standardized support for the parallel execution of ControlJobs 4 Support for processing materials on equip

8、ment that have batch sizes that are not either multi carrier or on which the carrier substrate location count is not an integer multiple of the batch size 5 Possible linkages between ControlJob material and substrate tracking 6 Complete work on the model for the control job queue Additional function

9、s and attributes for manipulating the job queue may be added 7 A section on conformance 3 3 2 The task force plans to finish these areas in 1999 3 4 This specification applies to equipment for which the atomic unit of material is the same for all input and output carriers on the equipment It may not

10、 apply to equipment which would perform operations such as slicing or assembly that would require or result in different input and output material objects 4 Referenced Standards 4 1 SEMI Standards SEMI E30 Generic Model for Communications and Control of SEMI Equipment GEM SEMI E39 Object Services St

11、andard Concepts Behavior and Services SEMI E40 Standard for Processing Management SEMI E53 Event Reporting NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standards 5 Terminology 5 1 control job defines a unit of work on equipment for one or more carriers

12、The work is described by a set of one or more process jobs to be applied to the material contained in the carriers 5 2 de queue the act of removing an item from a queue The de queue implies nothing about the status of the item after removal 5 3 equipment the intelligent system that communicates with

13、 the host SEMI E94 1000 SEMI 20002 5 4 host the intelligent system that communicates with the equipment 5 5 life cycle the processes and activities of something from its beginning creation to its ending 5 6 multi module equipment equipment that has more than one distinct processing resource e g cham

14、ber 5 7 production equipment equipment that measures or adds value to the product 5 8 protocol independent for software this means that the message descriptions are independent of delivery mechanisms 5 9 set up a description of the current process capability of an equipment 5 10 substrate basic unit

15、 of material on which work is performed to create a product Examples include wafers lead frames CD s die flat panel displays circuit boards and disks 5 11 substrate port the carrier location from which substrates are accessed by the equipment 5 12 uni carrier term for an equipment mode of operation

16、in which all material is returned to the source carrier after processing 5 13 user start activities that are initiated on a system by another system or operator 6 Conventions 6 1 Object Models 6 1 1 This standard uses object models to specify the control job interface 6 1 2 Object Services Standard

17、6 1 2 1 This document conforms to the conventions established by SEMI E39 6 1 3 Formal Name of an Object 6 1 3 1 The text capitalizes formal object name references similar to the way capitalization is normally used when discussing entities When describing something in the general like cities lower c

18、ase is used but when a specific entity is of interest New York City then first letters are capitalized 6 2 State Model Methodology 6 2 1 This document uses the Harel state chart convention for describing dynamic operation of defined objects The outline of this convention is described in an attachmen

19、t of SEMI E30 The official definition of this convention is described in State Charts A Visual Formalism for Complex Systems written by D Harel in Science of Computer Programming 8 1987 1 6 2 2 The Harel convention does not have the concept of state models of creation and extinction for expressing a

20、 temporary entity The job described in this document is such an entity and a copy of the same state model is used for an independent job newly created In this document a circle with a black circle inside is used for expressing extinction of an entity A filled black circle denotes the entry to the st

21、ate model the entity creation 6 2 3 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each state transition A transition table contains columns for Transition number Previous State Trigger New State Actions and Comments The trigger column 3 fo

22、r the transition occurs while in the previous state The actions column 5 includes a combination of 1 Actions taken upon exit of the previous state 2 Actions taken upon entry of the new state 3 Actions taken which are most closely associated with the transition 6 2 3 1 No differentiation is made betw

23、een these cases 6 2 4 The state models included in this standard are a requirement for Control Job Management compliance A state model consists of a state model diagram state definitions and a state transition table When using collection events all state transitions in this standard unless otherwise

24、 specified shall correspond to collection events 6 2 5 A state model represents the host s view of the equipment and does not necessarily describe the internal equipment operation When using collection events all Control Job Management state model transitions shall be mapped sequentially into the ap

25、propriate internal equipment collection events that satisfy the requirements of those transitions In certain implementations the equipment may enter a state and have already satisfied all of the conditions required by the Control Job Management state models for transition to another state In the cas

26、e the equipment makes the required transition without any additional actions in this situation 1 Elsevier Science P O Box 945 New York NY 10159 0945 http www elsevier nl homepage browse htt SEMI E94 1000 SEMI 20003 NumPrevious StateTriggerNew StateActionsComments 6 3 Service Message Representation 6

27、 3 1 Services are functions or methods that may be provided by either the equipment or the host A service message may be either a request message which always requires a response or a notification message that does not require a response 6 3 2 Service Definition 6 3 2 1 A service definition table de

28、fines the specific set of messages for a given service resource as shown in the following table Message Service NameTypeDescription 6 3 2 2 Type can be either N Notification or R Request it will no longer be the next job to run CJStopRTo request a ControlJob to stop Used to discontinue a job without

29、 risk to the material CJAbortRTo request a ControlJob to abort Used to discontinue a job on equipment that may be malfunctioning Material is at risk when this command is issued CJHOQRTo request a particular ControlJob to be set as the next control job to be SELECT ed 12 2 Parameter Definitions Table

30、 5 Parameter Definitions Table Parameter NameDescriptionFormat Possible Value ACKcodeTo return indication of result of service call Enumeration SUCCESS FAILURE ActionDirects activity of the control job service with regards to its process jobs when Cancel Abort and Stop requests are made In many case

31、s it is convenient to remove delete all the process jobs specified in the Control Job Enumeration SAVEJOBS REMOVEJOBS CtrlJobIDObjID object identifier of a control job Text ErrorCodeContains the code for the specific error found Enumerated ACKcode must equal FAILURE All services Unknown object insta

32、nce Parameters improperly specified Insufficient parameters specified CJStart Command not valid for current state CJPause Command not valid for current state CJResume Command not valid for current state CJCancel SEMI E94 1000 SEMI 200013 Parameter NameDescriptionFormat Possible Value Job cancelled C

33、ommand not valid for current state CJDeselect Command not valid for current state Busy when queue empty or resources for HOQ job would not be available CJStop Job stopped CJAbort Job aborted CJHOQ Command not valid for current state ErrorInfoThe parameter may be null or excluded on a SUCCESS List of

34、 ErrorCode ErrorText ErrorTextDescription of the error Text StatusInformation returned by service provider which indicates the result of the service call Structure ACKcode ErrorInfo 12 3 Message Details 12 3 1 This section specifies parameter usage by the service messages 12 3 2 Creating ControlJobs

35、 ControlJobs shall be created by using the OSS SEMI E39 Object Create message The following table defines the use of the AttrSetting arguments to the Object Create service Note ObjType is a required argument of Object Create and therefore should not be reset by including it as an AttrSetting argumen

36、t In the table M indicates mandatory O indicates optional and R specifies restricted shall be ignored if used 12 3 3 The process jobs specified for a control job must exist prior to calling this message If a process job does not exist the Create service shall fail and the ObjStatus shall return a li

37、st of any PRJob identifiers that were not present The Create request shall be rejected if the ControlJob queue is full Newly created control jobs will be put at the end of the queue Table 6 SetAttr Arguments Table Control Job Attribute NameUse as AttrSetting of Create Service ObjIDM ObjTypeR Current

38、PRJobR DataCollectionPlanO CarrierInputSpecM MtrlOutSpecM MtrlOutbyStatusO PauseEventO ProcessingCtrlSpecM ProcessOrderMgmtM StartMethodM StateR SEMI E94 1000 SEMI 200014 12 3 4 CJStart Starts jobs that require a user start The host sends this command only to a Control Job from which it has received

39、 a WAITINGFORSTART event Table 7 CJStart Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job Status MSuccess or failure 12 3 5 CJPause The ControlJob shall stop initiating process jobs Process jobs in the EXECUTING state are not affected by this command T

40、able 8 CJ Pause Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job Status MSuccess or failure 12 3 6 CJResume The ControlJob shall resume initiating process jobs Table 9 CJResume Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobI

41、DMMIndicate which job Status MSuccess or failure 12 3 7 CJCancel Used to remove a ControlJob from the Queue The command shall only succeed for jobs in the QUEUED state Table 10 CJCancel Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job ActionM Status MS

42、uccess or failure 12 3 8 CJDeselect Shall only succeed for jobs in the SELECTED state Deselected jobs must trade places with the job that is currently at the head of the queue If the job at the head of the queue cannot transition to the SELECTED state then the deselect request shall be rejected See

43、the section on Control Job Queue Model for information on breaking possible deadlocks Table 11 CJDeselect Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job Status MSuccess or failure 12 3 9 CJStop Stops the ControlJob from initiating any more process jo

44、bs Equipment should issue a STOP command to all running process jobs When the currently running process jobs have stopped the ControlJob will send a complete event with a status code indicating the ControlJob has stopped ControlJobStop shall only succeed on a job in the ACTIVE or QUEUED states When

45、CJStop is issued in the QUEUED state its affect will be identical to that of CJCancel SEMI E94 1000 SEMI 200015 Table 12 CJStop Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job ActionM Status MSuccess or failure 12 3 10 CJAbort Stops the control job fr

46、om initiating any more process jobs The currently running process jobs are sent the Abort command by the equipment When the equipment has detected the successful ABORT of currently running process jobs the ControlJob shall send a complete event with a status code indicating the job was aborted Contr

47、olJobAbort shall only succeed on a job in the ACTIVE or QUEUED states When CJAbort is issued in the QUEUED state its affect will be identical to that of CJCancel The equipment due to a serious alarm situation operator risk may internally generate this command Table 13 CJAbort Service Parameter Defin

48、itions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIndicate which job ActionM Status MSuccess or failure 12 3 11 CJHOQ The other jobs in the queue are pushed back rest of queue order remains unchanged Table 14 CJHOQ Service Parameter Definitions Table ParameterReq IndRsp CnfComment CtrlJobIDMMIn

49、dicate which job Status MSuccess or failure 13 Variable Data 13 1 The following table provides the definition of additional Variable Data that equipment shall support for Control Job Management Table 15 Variable Data Definitions Table Variable NameDescriptionTypeAccessComment CtrlJobIDControl job id

50、entifier available to be used in control job related event reports TextRO DataCollectionPlanUsed to report the ControlJob s DataCollectionPlan attribute This information may be useful in the Collection Event that reports Execution began for a ControlJob TextROSupport for this is optional QueuedCJobs