SEMI E40-0301 STANDARD FOR PROCESSING MANAGEMENT

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1、SEMI E40 0301 SEMI 1995 20011 SEMI E40 0301 STANDARD FOR PROCESSING MANAGEMENT This standard was technically approved by the Global Information to be published March 2001 Originally published in 1995 previously published October 2000 1 Purpose 1 1 Automated management and command of material process

2、ing in equipment is a crucial aspect enabling factory automation This standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in an equipment 1 2 This standard specifies the application of the appropriate processing to

3、 specified material received at the processing agent It describes the concepts of material processing the behavior of the equipment in relation to processing and the messaging services which are needed to accomplish the task 1 3 The communications services defined here enable standards based interop

4、erability of independent systems They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them 1 4 Implementation of automated processing management will help eliminate misprocessing of material The adopti

5、on of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing Compliance requires a minimal but specific set of standard services 2 Scope 2 1 The scope of this standard is automated material processing based

6、 on discrete processing jobs It provides the functionality required for process management for modules within a cluster tool It may be applied to sub systems of other multi resource equipment as well as to host control of many types of equipment 2 2 This standard supports individual management of jo

7、bs for identical processing of material within a group and concurrent processing of independent groups Where material contains other material such as carriers containing wafers processing may be specified in terms of either material type 2 3 A simple tuning mechanism is provided for limited feedforw

8、ard and feedback control between process steps A method is defined for taking advantage of recipe variable parameters This is not expected to satisfy all closed loop control requirements Other mechanisms are anticipated with greater flexibility for late tuning and handling complex data 2 4 This stan

9、dard does not provide services for receiving material for processing or disposing of it after processing is complete Automation of material transfer is assumed to be provided through other services such as those defined in applicable SEMI standards 2 5 This standard presents a solution from the conc

10、epts and behavior down to the messaging services It does not define the messaging protocol 2 6 A messaging service includes the identification that a message shall be exchanged and a definition of the data which is contained in that message It does not include information on the structure of the mes

11、sage how the data is represented within the message or how the message is exchanged This additional information is contained within the message protocol 2 7 The defined services may be applied to multiple protocols Information on the mapping of processing management services to special protocols e g

12、 SECS II are added as adjunct standards 2 8 The services assume a communications environment in which a reliable connection has been established between the user of the services and the provider of the services Establishing maintaining releasing a connection and handling communication failures are b

13、eyond the scope of this standard 2 9 This standard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to u

14、se 3 Referenced Standards 3 1 SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content SECS II SEMI E30 Generic Model for Communications and Control of SEMI Equipment GEM SEMI E40 0301 SEMI 1995 20012 SEMI E39 Object Services Standard Concepts Behavior and Services SEMI E53 Ev

15、ent Reporting NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standards 4 Terminology 4 1 The following definitions are arranged in alphabetical order Some definitions use terms defined elsewhere within this section No references beyond this section should

16、 be necessary for a basic understanding of these terms 4 2 Definitions 4 2 1 agent an intelligent system within a factory that provides one or more service resources and uses the services of other agents A generalization of host equipment cell cluster cluster module station controller and work stati

17、on Agents are associated with a physical system or a collection of physical systems including computer platforms 4 2 2 form type of data representing information contained in an object attribute or service message parameter The data types are detailed in Section 4 2 4 2 3 fundamental requirements th

18、e requirements for information and behavior that must be satisfied for compliance to a standard Fundamental requirements apply to specific areas of application objects or services 4 2 4 post conditioning activities performed by the processing resource after departure of the material being processed

19、but related to the processing of that material e g cleanup 4 2 5 pre conditioning activities performed by the processing resource before arrival of the material being processed but related to the processing of that material 4 2 6 processing agent an intelligent system within a factory which is indep

20、endently capable of providing manufacturing value added to material 4 2 7 processing resource an entity within a processing agent which provides the manufacturing value added to material 4 2 8 process job a material processing job for a processing resource specifying and tracking the processing to b

21、e applied to the material 4 2 9 recipe the pre planned and reusable portion of the set of instructions settings and parameters under control of a processing resource that determines the processing environment seen by the material Recipes may be subject to change between runs or processing cycles 4 2

22、 10 recipe executor a component of a module that stores and executes recipes 4 2 11 recipe namespace a logical management domain with the responsibility for the storage and management of recipes It ensures the uniqueness of recipe identifiers and provides services pertaining to recipes stored within

23、 that domain 4 2 12 service the set of messages and definition of the behavior of a service provider that enables remote access to a particular functionality 4 2 13 service provider the software control entity that is the provider of a particular functionality which may be accessible remotely 4 2 14

24、 service user the software control entity that is the user of any of the related services 4 2 15 supervisor an entity or entities having supervisory control responsibilities for one or more processing resource It is the service user of the processing management services 4 2 16 tuning specification o

25、f information which supplements the pre defined recipe used to achieve the particular process goals 4 3 Data Type 4 3 1 boolean may take on one of two possible values equating to TRUE or FALSE 4 3 2 enumerated may take on one of a limited set of possible values These values may be given logical name

26、s but they may be represented by any single item data type 4 3 3 form type of data positive integer unsigned integer integer enumerated boolean text formatted text structure list ordered list 4 3 4 formatted text a text string with an imposed format This could be by position by use of special charac

27、ters or both 4 3 5 integer may take on the value of any negative or unsigned integer Messaging protocol may impose a limit on the range of possible values 4 3 6 list a set of one or more items that are all of the same form one of the above forms 4 3 7 ordered list a list for which the order in which

28、 items appear is significant 4 3 8 positive integer may take the value of any positive whole number Messaging protocol may impose a limit on the range of possible values SEMI E40 0301 SEMI 1995 20013 4 3 9 structure a complex structure consisting of a specific set of items of possibly mixed data typ

29、es in a specified arrangement 4 3 10 text a text string Messaging protocol may impose restrictions such as length or ASCII representation 4 3 11 unsigned integer may take the value of any positive integer or zero Messaging protocol may impose a limit on the range of possible values 5 Conventions 5 1

30、 Harel State Model This document uses the Harel State Chart notation to describe the dynamic behavior of the objects defined An overview of this notation is presented in an appendix of SEMI E30 The formal definition of this notation is presented in Science of Computer Programming 8 Statecharts A Vis

31、ual Formalism for Complex Systems by D Harel 1987 5 1 1 The Harel notation does not include the concept of creation and deletion of state models to represent transient entities The job described in this document is such an entity where each new job created uses a copy of the same state model In this

32、 document an oval is used to denote the creation of an entity and also the deletion of that entity 5 1 2 Transition tables are provided in conjunction with the state diagrams to describe explicitly the nature of each state transition A transition contains columns for Transition Current State Trigger

33、 New State Action s The trigger column 3 for the transition occurs while in the current state The actions column 5 include a combination of 1 actions taken upon exit of the current state 2 actions taken upon entry of the new state and 3 actions taken which are most closely associated with the transi

34、tion No differentiation is made 5 1 3 The state models included in this standard are a requirement for Processing Management compliance A state model consists of a state model diagram state definitions and a state transition table When using SEMI E30 E53 or similar style collection events all state

35、transitions in this standard unless otherwise specified shall correspond to collection events 5 1 4 A state model represents the host s view of the equipment and does not necessarily describe the internal equipment operation When using collection events all Processing Management state model transiti

36、ons shall be mapped sequentially into the appropriate internal equipment collection events that satisfy the requirements of those transitions In certain implementations the equipment may enter a state and have already satisfied all of the conditions required by the Processing Management state models

37、 for transition to another state In the case the equipment makes the required transition without any additional actions in this situation 5 2 Object Attribute Representation The object information models for standardized objects will be supported by an attribute definition table with the following c

38、olumn headings Attribute NameDefinitionAccessRequirementForm The formal text name of the attribute Description of the information contained RO or RWY or N see below 5 2 1 The Access column uses RO Read Only or RW Read and Write to indicate the access that service users have to the attribute 5 2 2 A

39、Y or N in the requirement Rqmt column indicates if this attribute must be supported in order to meet fundamental compliance for the service 5 2 3 The Form column is used to indicate the format of the attribute See Section 4 1 for definitions 5 3 Service Message Representation 5 3 1 Service Resource

40、Definition A service resource definition table defines the specific set of messages for a given service group as shown in the following table Message Service NameTypeDescription Message NameN or RThe intent of the service SEMI E40 0301 SEMI 1995 20014 5 3 1 1 Type can be either N Notification or R R

41、equest 5 3 1 2 Notification type messages are initiated by the service provider and the provider does not expect to get a response from the consumer subscriber 5 3 1 3 Request messages are initiated by a service consumer or subscriber Request messages ask for data or an activity from the provider Re

42、quest messages expect a specific response message no presumption on the message content 5 3 2 Service Parameter Dictionary A service parameter dictionary table defines the parameters used in a service as shown in the following table ParameterFormDescription Parameter XData TypeA parameter called X i

43、s B in A 5 3 2 1 A row is provided in the table for each parameter of the service The first column contains the name of the parameter This is followed by columns describing the form and contents of the corresponding primitive 5 3 2 2 The Form column is used to indicate the type of data contained in

44、a parameter See Section 4 2 for definitions 5 3 2 3 The Description column in the Service Parameter Dictionary table describes the meaning of the parameter the values it can take on and any inter relationships with other parameters 5 3 2 4 To prevent the definition of numerous parameters named XxxLi

45、st this document adopts the convention of referring to the list as List of Xxx In this case the definition of the variable Xxx will be given not of the list The term list indicates a collection or set of zero or more items of the same data type Where a list is used in both the request and the respon

46、se the list order in the request is retained in the response A list must contain at least one element unless zero elements are specifically allowed 5 3 3 Service Message Definition A service message definition table defines the parameters used in a service as shown in the following table ParameterRe

47、q IndRsp CnfDescription Parameter X see below see below A description of the service 5 3 3 1 The columns labeled Req Ind and Rsp Cnf link the parameters to the direction of the message The message sent by the initiator is called the Request The receiver terms this message the Indication or the reque

48、st The receiver may then send a Response which the original sender terms the Confirmation 5 3 3 2 The following codes appear in the Req Ind and Rsp Cnf columns and are used in the definition of the parameters e g how each parameter is used in each direction MMandatory Parameter Must be given a valid

49、 value CConditional Parameter May be defined in some circumstances and undefined in others Whether a value is given may be completely optional or may depend on the value of the other parameter UUser Defined Parameter The parameter is not used for response only Indicates that the value of this parame

50、ter in the response must match that in the primary if defined 6 Overview 6 1 Processing management is concerned with the processing of material by a processing resource Its principle function is to ensure that material delivered to the processing resource is processed with the correct recipe It defi