SEMI E87-0301 PROVISIONAL SPECIFICATION FOR CARRIER MANAGEMENT

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1、SEMI E87 0301 SEMI 1999 20011 SEMI E87 0301 PROVISIONAL SPECIFICATION FOR CARRIER MANAGEMENT CMS This specification was technically approved by the Global Information to be published March 2001 Originally published September 1999 previously published October 2000 1 Purpose 1 1 This document provides

2、 a standardized behavior for host view communication with production equipment during the coordination execution and completion of automated and manual carrier transfers to and from the equipment and if it exists its internal buffer space 2 Scope 2 1 This is a provisional standard that covers host a

3、nd equipment communication for SEMI E15 1 300 mm load ports The provisional status is required because of the immaturity of implementations of integrated equipment with Automated Material Handling Systems AMHS and additional specifications may yet be defined to add further functionality Also further

4、 exception handling and error recovery scenarios need to be defined 2 2 The scope of this document is to define standards that facilitate the host s knowledge and role in automated and manual carrier transfers as well as internal buffer equipment carrier transfers Specifically this document provides

5、 state models and scenarios that define the host interaction with the equipment for the following Carrier transfer between AMHS vehicles and production equipment load ports Carrier transfers to from production equipment internal buffer space Equipment and load port access mode switching Carrier to l

6、oad port association CarrierID verification and Carrier slot map verification 2 3 In order for the provisional status to be removed the following issues must be resolved Linkage to substrate tracking control job and process job management standards Carrier location information Whether to use objects

7、 to represent carrier locations and load ports The possible values for the carrier processing status attribute and whether or not a state model is needed for that attribute 2 4 This standard does not purport to address safety issues if any associated with its use It is the responsibility of the user

8、s of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 3 Limitations 3 1 This standard applies to semiconductor equipment with SEMI E15 1 compliant load ports It may also be applied to other manufacturing equipme

9、nt that supports automated carrier transfers and or contains an internal buffer This standard is intended to be used for production equipment It may or may not be applied to other types of equipment Also stocker load ports are not addressed by this standard 4 Referenced Standards 4 1 SEMI Standards

10、SEMI E15 Specification for Tool Load port SEMI E15 1 Provisional Specification for 300 mm Tool Load port SEMI E30 Generic Model for Communications and Control of SEMI Equipment GEM SEMI E39 Object Services Standard Concept Behavior and Services SEMI E41 Exception Management EM Standard SEMI E53 Even

11、t Reporting SEMI E62 Provisional Specification for 300 mm Front Opening Interface Mechanical Standard FIMS SEMI E90 Specification for Substrate Tracking SEMI E99 Carrier ID Read Write Functional Standard NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted stan

12、dards SEMI E87 0301 SEMI 1999 20012 5 Terminology 5 1 Abbreviations and Acronyms 5 1 1 AGT Automated Guided Transport 5 1 2 AGV Automated Guided Vehicle 5 1 3 AMHS Automated Material Handling System 5 1 4 FIMS Front Opening Interface Mechanical Standard 5 1 5 FOUP Front Opening Unified Pod 5 1 6 GEM

13、 Generic Equipment Model 5 1 7 OHT Overhead Hoist Transport 5 1 8 PGV Person Guided Vehicle 5 1 9 PIO Parallel Input Output Interface 5 1 10 RGT Rail Guided Transport 5 1 11 RGV Rail Guided Vehicle 5 2 Definitions 5 2 1 Automated Material Handling System an automated system to store and transport ma

14、terials within the factory 5 2 2 automation the degree to which activities of machines or production systems are self acting In this standard automation provides methods that will reduce the amount of operator intervention required 5 2 3 buffer a set of one or more locations for holding carriers at

15、inside the production equipment 5 2 4 carrier a container such as a FOUP or open cassette with one or more positions for holding substrates 5 2 5 CarrierID a readable and unique identifier for the carrier 5 2 6 CarrierID read the process of the equipment reading the CarrierID from the carrier 5 2 7

16、carrier ID tag tag ID tag a physical device for storing Carrier ID and other information There are two basic types of tags read only tags and read write tags SEMI E99 5 2 8 Collection Event a collection event is an event or grouping of related events on the equipment that is considered to be signifi

17、cant to the host 5 2 9 docked position the position where the carrier is ready for wafer extraction or insertion 5 2 10 FIMS port the substrate access port where the FOUP is opened and closed 5 2 11 fixed buffer equipment production equipment that has only fixed load ports and no internal buffer for

18、 carrier storage Substrates are loaded and unloaded directly from the carrier at the load port for processing 5 2 12 host the factory computer system or an intermediate system that represents the factory and the user to the equipment 5 2 13 internal buffer a set of locations within the equipment to

19、store carriers These locations exclude load ports 5 2 14 internal buffer equipment equipment that uses an internal buffer 5 2 15 load the operation of placing a carrier on a load port 5 2 16 load port the interface location on the equipment where carriers are loaded and unloaded 5 2 17 object instan

20、tiation the act of storing of information related to a physical or logical entity so that it can be recalled on demand based on its public identifier 5 2 18 on line equipment equipment that is con nected to and able to communicate fully with the host 5 2 19 process equipment equipment used to produc

21、e product such as semiconductor devices This excludes metrology and material handling equipment 5 2 20 production equipment equipment used to produce product such as semiconductor devices including substrate sorting process and metrology equipment and excluding material handling equipment 5 2 21 pro

22、perties a set of name value pairs assigned to an object or used in a service message to include additional information about the object i e carrier port etc 5 2 22 re initialization a process where production equipment is either powered off then on or when some kind of hardware or software reset is

23、initiated to cause the equipment to reset and possibly reload its software On production equipment that contains some kind of mass storage device this can also be called a reboot 5 2 23 read position any position on a load port or in an internal buffer from which the tag on a carrier can be read NOT

24、E 2 This position may vary on any particular equipment depending on the read technology selected by the end user Some technology load ports may allow the carrier to be moved during reading Equipment may have more than one read position SEMI E87 0301 SEMI 1999 20013 5 2 24 single communication connec

25、tion exactly one physical connection using exactly one logical session and a standard set of messages 5 2 25 slot map the information that relates which slots in a carrier hold substrates both correctly and incorrectly 5 2 26 slot map read the process of the equipment reading the slot map for substr

26、ate position and placement within the carrier 5 2 27 standard message set messages conforming to standard message specifications 5 2 28 substrate material held within a carrier This can be product or durables such as reticles 5 2 29 substrate port the carrier location from which substrates are acces

27、sed by the equipment 5 2 30 transfer unit maximum number of carriers allowed in a specific transfer service AA is the maximum number of carriers allowed for acquisition at the transfer source BB is the maximum number of carriers allowed for deposit at the transfer destination CC is the maximum numbe

28、r of carriers allowed for transfer in one transport vehicle The transfer unit is the minimum of AA BB and CC 5 2 31 undocked the status of a carrier on a load port or in an internal buffer that is not at the docked position 5 2 32 unload the operation of removing a carrier from a load port 5 2 33 wr

29、ite position any position on a load port or in an internal buffer from which the tag on a carrier can be written to This position may vary on any particular equipment depending on the write technology selected by the end user Some technology load ports may allow the carrier to be moved during writin

30、g The read position and the write position may or may not be the same position 6 Requirements 6 1 Carrier Management Standard CMS compliant equipment is required to provide certain capabilities defined by other standards accessibility to status infor mation event reporting alarm management and equip

31、 ment control These requirements shall be satisfied through compliance to the following sets of standards 6 2 Generic Equipment Model Standard GEM SEMI E30 Event Notification Status Data Collection Equipment Constants Alarm Management Equipment Control 6 3 Object Based Standards Object Services Stan

32、dard SEMI E39 Event Reporting SEMI E53 Exception Management SEMI E41 7 Conventions 7 1 Objects 7 1 1 Whenever the equipment is required to know about specific kinds of entities and required to manage information concerning these entities it is useful to treat these entities as objects that comply wi

33、th the basic requirements of SEMI E39 Object Services Standard OSS This is especially true whenever there are a large number of objects of a given type or when the entities are transient rather than permanent In both cases it is difficult to describe a general way for the host and equipment to speci

34、fy which particular entity is referenced and to get information related only to a specific one out of many 7 1 2 By defining these entities as objects that comply with OSS it is only necessary for the host to specify the type of object and its specific identifier in order to inquire about one or mor

35、e properties of the specific entity of interest 7 1 3 Object Properties 7 1 3 1 A property attribute is information about an individual object that is presented as a name value pair The name is a formally reserved text string that represents the property and the value is the current setting for that

36、 property 7 1 3 2 Properties shall be accessible to the host via the service GetAttr and SetAttr for the Carrier and Carrier Location objects Using SEMI E39 Object Services Standard for example it is possible to get the list of IDs for the current carriers at the equipment and get the specified prop

37、erties for one or more individual carriers 7 1 4 Rules for Object Properties Attributes with RO access can not be changed using SetAttr service as defined in OSS SEMI E87 0301 SEMI 1999 20014 Attributes with RW access can be changed using SetAttr service as defined in OSS Additional attributes may b

38、e specified by the user or the equipment supplier by using an attribute name starting with UD User Defined Care should be taken to ensure the name of the attribute is unique 7 1 5 Object Attribute Table 7 1 5 1 The object attribute table is used to list all the attributes related to the defined obje

39、ct as shown below the access is defined as Read only RO or Read Write RW The REQD column is used to specify whether the attribute is required for implementation Finally the Form column is used to specify the format of that particular attribute Table 1 Object Attribute Table Attribute NameDefinitionA

40、ccessReqdForm ObjTypeObject typeROYText Carrier 7 2 State Model Methodology 7 2 1 A state model has three elements definitions of each state and sub state a diagram of the states and the transitions between states and a state transition table The diagram of the state model uses the Harel State Chart

41、 notation An overview of this notation is presented in an Appendix of SEMI E30 The definition of this notation is presented in Science of Computer Programming 8 Statecharts A Visual Formalism for Complex Systems by D Harel 1987 1 7 2 2 State Model Requirements 7 2 2 1 The state models included in th

42、is standard are a requirement for CMS compliance A state model consists of a state model diagram state definitions and a state transition table All state transitions in this standard unless otherwise specified shall correspond to collection events 7 2 2 2 A state model represents the host s view of

43、the equipment and does not necessarily describe the internal equipment operation All CMS state model transitions shall be mapped sequentially into the appropriate internal equipment collection events that satisfy the requirements of those transitions In certain implementations the equip ment may ent

44、er a state and have already satisfied all of the conditions required by the CMS state model for transition to another state In this case the equipment makes the required transition without any additional actions in this situation 7 2 2 3 Some equipment may need to include additional sub states other

45、 than those in this standard Additional sub states may be added but shall not change the CMS defined state transitions All expected transitions between CMS states shall occur 7 2 2 4 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each state

46、 transition A transition table contains columns for Transition number Previous State Trigger New State Actions and Comments The trigger column 3 for the transition occurs while in the previous state The actions column 5 includes a combination of Actions taken upon exit of the previous state Actions

47、taken upon entry of the new state Actions taken which are most closely associated with the transition Table 2 State Transition Table NumPrevious StateTriggerNew StateActionsComments 1 Elsevier Science P O Box 945 New York NY 10159 0945 http www elsevier nl homepage browse htt SEMI E87 0301 SEMI 1999

48、 20015 7 3 Services 7 3 1 Services are functions or methods that may be provided by either the equipment or the host A service message may be either a request message which always requires a response or a notification message that does not require a response 7 3 2 Service Message Description 7 3 2 1

49、 A service message description table defines the parameters used in a service as shown in the following table Table 3 Service Message Description Table Service NameTypeDescription Type can be either N Notification or R Request 2 CarrierID read with no currently existing carrier objects having the ca

50、rrierID just read and 3 ProceedWithCarrier or CancelCarrier Service on an UNASSOCIATED port with a carrier 10 2 4 Carrier Object Identifier ObjID 10 2 4 1 The purpose of an Object Identifier is to allow references to an object within the system The object identifier is created when an object is inst