SEMI E90-0301 SPECIFICATION FOR SUBSTRATE TRACKING

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1、SEMI E90 0301 SEMI 1999 20011 SEMI E90 0301 SPECIFICATION FOR SUBSTRATE TRACKING This specification was technically approved by the Global Information to be published March 2001 Originally published September 1999 previously published October 2000 1 Purpose 1 1 The purpose of this standard is to pro

2、vide the standard services of equipment to track substrates manufactured product in manufacturing equipment This standard defines the concepts and behaviors for the information management of substrates as well as the messages services 2 Scope 2 1 Essentially information about substrates must be mana

3、ged by the factory system while the equipment is required to provide the services for the substrate information management This standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment 2 2 The scope of this standard is to define t

4、he information services of equipment that can be requested by the user To clarify required services the concepts and behaviors of the substrate and the substrate location are defined 2 3 This standard is applicable to any manufacturing equipment that handles substrates To implement these services th

5、e equipment and factory system must be integrated by means of a communication link 2 4 This standard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the

6、applicability of regulatory limitations prior to use 3 Limitations 3 1 This standard assumes that the substrate s to be managed has been resident in the equipment and has been given a substrate identifier 3 2 The service for a substrate is valid while the substrate is registered in the equipment Tha

7、t is the service is available from the moment that the substrate is registered into the equipment and to the moment that the substrate is removed from the equipment 3 3 This standard is only for information services It does not address any mechanism to read or write information from to the substrate

8、 4 Referenced Standards 4 1 SEMI Standards SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment GEM SEMI E39 Object Services Standard Concepts Behavior and Services SEMI E53 Event Reporting SEMI E87 Provisional Specification for Carrier Management CMS NOTE 1 As listed or

9、revised all documents cited shall be the latest publications of adopted standards 5 Terminology 5 1 Definitions 5 1 1 carrier ID the name to identify a specific substrate carrier 5 1 2 carrier slot physical location capable of holding a substrate within cassette type carrier 5 1 3 carrier slot map t

10、he registry of substrates to the substrate carrier slots 5 1 4 carrier substrate location a substrate location within a substrate carrier capable of holding a substrate 5 1 5 default substrate ID default ID the substrate ID assigned to the substrate when no substrate ID infor mation is given by the

11、user but the carrier ID for the source carrier is known The default ID is the combined text of the source carrier ID and the slot number 5 1 6 equipment substrate location a substrate location on a equipment resource 5 1 7 location ID the name of a material location 5 1 8 lot a group of one or more

12、substrates of the same type A lot must be organized by the user The group may be referred to for tracking of substrates in the factory 5 1 9 material location an identifiable place within the equipment or carrier where material can be held 5 1 10 register an operation that adds the substrate object

13、to the equipment s database This operation is SEMI E90 0301 SEMI 1999 20012 performed automatically when the equipment receives both a carrier and information from the host about the contents of the carrier The operation is also performed automatically when the equipment detects the substrate ID 5 1

14、 11 remove the operation that removes a substrate from the equipment 5 1 12 service represents a function offered to a user by a provider A service consists of a sequence of service primitives each described by a list of parameters 5 1 13 substrate the basic unit of material on which work is perform

15、ed to create a product Examples include wafers die plates used for masks flat panels circuit boards and leadframes 5 1 14 substrate carrier a carrier to hold substrates to be transferred to from the equipment A substrate carrier has one or more position to hold substrates carrier substrate location

16、5 1 15 substrate history ordered set of information about the locations visited by the substrate 5 1 16 substrate ID identifier of a substrate 5 1 17 substrate location a material location which is capable of holding a substrate For example but not limited to process modules transfer subsystems wafe

17、r chucks robot end effecter and carrier slots 5 1 18 substrate type represents the type of the substrate such as wafers CDs flat panels or masks 5 2 Data Type 5 2 1 Boolean may take on one of two possible values equating to TRUE or FALSE 5 2 2 enumerated may take on one of a limited set of possible

18、values These values may be given logical names but they may be represented by any single item data type except floating point 5 2 3 floating point may take on any single numeric value positive or negative Messaging protocol may impose a limit on the range of possible values 5 2 4 form type of data p

19、ositive integer unsigned integer integer floating point enumerative Boolean text formatted text structure list and ordered list 5 2 5 formatted text text with an imposed format This could be by position by use of special characters or both 5 2 6 integer may take on the value of any negative or unsig

20、ned integer Messaging protocol may impose a limit on the range of possible values 5 2 7 list a set of one or more items that are all of the same form one of the above forms 5 2 8 ordered list a list for which the order in which items appear is significant 5 2 9 positive integer may take the value of

21、 any positive whole number Messaging protocol may impose a limit on the range of possible values 5 2 10 structure a complex set of information consisting of specific sets of items of possibly mixed data types in a specified arrangement 5 2 11 text a text string The message protocol restricts its len

22、gth or ASCII representation Messaging protocol may impose restrictions such as length or ASCII representation 5 2 12 unsigned integer may take the value of any positive integer or zero Messaging protocol may impose a limit on the range of possible values 6 Convention 6 1 Harel State Model 6 1 1 This

23、 document uses the Harel state chart convention for describing dynamic operation of defined objects The outline of this convention is described in an attachment of SEMI E30 The official definition of this convention is described in Statecharts A Visual Formalism for Complex Systems written by D Hare

24、l in Science of Computer Programming 8 1987 1 6 1 2 A transition table is used with the state chart for clearly describing the character of each state transition The table contains the folllowing a transition number current state trigger new state and operation in transition 6 2 OMT Object Informati

25、on Model 6 2 1 The object models are represented using the Object Modeling Technique OMT developed by Rumbaugh James et al in Object Oriented Modeling Design Prentice Hall Englewood Cliffs NJ 1991 2 6 2 2 An overview of this notation is provided in the Appendix 1 of SEMI E39 6 3 Object Attributes Re

26、presentation 6 3 1 The object information model for standardized objects will be supported by an attribute definition table with the following column headings 1 Elsevier Science P O Box 945 New York NY 10159 0945 http www elsevier nl homepage browse htt 2 Prentice Hall Inc Upper Saddle River NJ 0745

27、8 SEMI E90 0301 SEMI 1999 20013 Attribute NameDefinitionAccessReqmtFormat The formal text name of the attributes Description of information contained RO or RW Y or NRefer to the description below 6 3 1 1 The Access column uses RO read only or RW read write to indicate the access that a service user

28、has to the attribute 6 3 1 2 A Y or N in the Requirement Reqmt column indicates if this attribute must be supported in order to meet the fundamental requirement for the service 6 3 1 3 The Format column is used for showing the data type of the attribute See Section 5 2 6 4 Service Message Representa

29、tion 6 4 1 Service Resource Definition A service resource definition table defines the specific sets of messages for a service group as shown in the following table Message Service NameTypeDescription Message nameN or RPurpose of the service 6 4 1 1 Type can be either N Notification or R Request Not

30、ification type messages are initiated by a service provider and the provider does not expect to get the response from the service user or requester 6 4 1 2 Request messages are initiated by a service user or requester The Request message asks for data or an activity from the provider Request message

31、s expect a specific response message no presumption on the message context 6 4 2 Service Parameter Dictionary A service parameter dictionary table defines the parameters for one or more services as shown in the following table ParameterFormDescription Parameter XData typeThe parameter called X is B

32、in A 6 4 2 1 A row is provided in the table for each parameter of the service The first column contains the name of the parameter This is followed by columns describing form and contents of the corresponding primitive 6 4 2 2 The Form column is used to indicate the type of data contained in a parame

33、ter See Section 5 2 for definitions 6 4 2 3 The Description column in the Service Parameter Dictionary table describes the meaning of the parameter the values it can assume and any interrelationships with other parameters 6 4 2 4 To prevent the definition of numerous parameters named XxxList this do

34、cument adopts the convention of referring to the list as List of Xxxx In this case the definition of the variable Xxx will be given not of the list The term list indicates a collection or set of zero or more items of the same data type Where a list is used in both the request and the response the li

35、st order in the request is retained in the response A list must contain at least one element unless zero elements are specifically allowed 6 4 3 Service Message Definition A service message definition table defines the parameter used in a service as shown in the following table ParameterReq IndRsp C

36、onfDescription Parameter Xsee belowsee belowA description of the service 6 4 3 1 The columns labeled Req Ind and Rsp Conf link the parameters to the direction of the message The message sent by the initiator is called the Request The receiver terms this message the Indication The receiver may then s

37、end a Response which the original sender terms the Confirmation SEMI E90 0301 SEMI 1999 20014 6 4 3 2 The following codes appear in the Req Ind and Rsp Conf columns and are used in the definition of the parameters e g how each parameter is used in each direction M Mandatory Parameter must be given a

38、 valid value C Conditional Parameter may be defined in some circumstances and undefined in others Whether a value is given may be completely optional or may depend on the values of other parameters U User Defined Parameter The parameter is not used for response only Indicates that the value of this

39、parameter in the response shall match the value in the primary if defined 7 Overview 7 1 Purpose of Substrate Tracking 7 1 1 Substrate tracking consists of two kinds of capabilities as described below 7 1 2 Substrate Location Tracking Substrate Location Tracking provides the capability to determine

40、the current location of substrates in the equipment The indication of the substrate location will help the user to understand the environment to which the substrate is exposed in the equipment 7 1 3 Substrate History Record Substrate History Record provides the capability to read the history of subs

41、trates in the equipment The user can inquire about the history of a particular substrate or substrate location A history includes the series of locations that the substrate has visited in the equipment 7 1 4 Substrate Process Tracking Substrate Process Tracking provides the capability of tracking cu

42、rrent substrate processing state For example the user may determine whether a substrate is processed or not by requesting its state when the process has been completed abnormally The user may use the state transitions to trigger wafer level data collection 7 2 View of Substrate Tracking 7 2 1 Figure

43、 1 shows the view of Substrate Tracking using the OMT representation It is assumed that substrates are available before usage of the services Substrate carriers may or may not be used to load the substrates to the equipment Substrates are loaded into the equipment and travel through substrate locati

44、ons The equipment must maintain all information necessary to track substrates in the equipment 7 3 Substrate Location 7 3 1 A substrate location is a discrete position that can hold a substrate in the equipment This document will not define where the substrate location exists Substrate locations sha

45、ll be determined by the design of equipment and the applications For example to track the order of process chambers that is applied to a substrate process in a multi chamber equipment it is appropriate to designate process chambers for substrate locations All substrate locations shall be documented

46、by the equipment supplier 7 3 2 Figure 2 shows the concept of the substrate location using OMT representation This figure is provided to clarify the definition of locations Substrate Substrate Location Lot Substrate Carrier Equipment processes belongs to is held at 1 provides 1 1 Figure 1 Overview o

47、f Substrate Tracking SEMI E90 0301 SEMI 1999 20015 Material Location Substrate Location Carrier Location CarrierSubstrate Equipment Substrate Location Carrier Substrate Location has holds travels on Figure 2 Concept of Substrate Location 7 3 3 Material Location is classified into Substrate Location

48、and Carrier Location A Carrier Location may hold a carrier and a Substrate Location may hold a substrate 7 3 4 Substrate Location is classified into Equipment Substrate Location and Carrier Substrate Location Carrier has Carrier Substrate Locations A Carrier Substrate Location is the location which

49、can hold a substrate in a carrier An Equipment Substrate Location is the location which can hold a substrate on the equipment resource 7 3 5 Substrate travels on substrate locations 7 4 Identification of Substrate 7 4 1 Substrate shall be identified by substrate ID There are options for assigning su

50、bstrate ID to a substrate When a carrier is used for loading substrates and the carrier is given its carrier ID substrate IDs can be obtained by utilizing the carrier ID and carrier substrate location This standard will define the requirement for the substrate ID assignment to the substrates in a ca