SEMI E62-0301 PROVISIONAL SPECIFICATION FOR 300 mm FRONT-OPENING

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1、SEMI E62 0301 SEMI 1997 20011 SEMI E62 0301 PROVISIONAL SPECIFICATION FOR 300 mm FRONT OPENING INTERFACE MECHANICAL STANDARD FIMS This provisional specification was technically approved by the Global Physical Interfaces to be published March 2001 Originally published in 1997 previously published Sep

2、tember 1999 1 Purpose 1 1 This standard specifies the tool side of the interface between a process or metrology tool and a front opening box used to transport and store 300 mm wafers which may or may not be in removable cassettes in an IC factory 2 Scope 2 1 This standard is intended to set an appro

3、priate level of specification that places minimal limits on innovation while ensuring modularity and interchange ability at all mechanical interfaces Only the physical interface is specified no materials requirements or micro contamination limits are given The interface specified in this standard ca

4、n be for a sealed mini environment but it could also just be a well defined automation interface 2 2 This standard is provisional because the front opening interface is a new technology Once interface testing is done this standard should be modified and upgraded from provisional status 2 3 This stan

5、dard does not purport to address safety issues if any associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 3 Referenced Standards 3 1 SEMI Standards S

6、EMI E1 9 Provisional Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface SMIF SEMI E44 Guide for Procurement and Acceptance of Minienvironments SEMI E47 1 Provisional Mechanical Specificatio

7、n for Boxes and Pods Used to Transport and Store 300 mm Wafers SEMI E57 Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers 3 2 ISO Standard1 ISO 4287 Geometrical Product Specifications GPS Surface texture Profile method Terms definitions and surface text

8、ure parameters NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standards 4 Terminology 4 1 Definitions 4 1 1 bilateral datum plane a vertical plane that bisects the wafers and that is perpendicular to both the horizontal and facial datum planes as defined

9、in SEMI E57 4 1 2 box a protective portable container for a cassette and or substrate s as defined in SEMI E44 4 1 3 carrier capacity the number of substrates that a carrier holds as defined in SEMI E1 9 4 1 4 cassette an open structure that holds one or more substrates as defined in SEMI E44 4 1 5

10、door seal zone a surface on the exterior side of the port door for sealing to the box door 4 1 6 facial datum plane a vertical plane that bisects the wafers and that is parallel to the front side of the carrier where wafers are removed or inserted On tool load ports it is also parallel to the load f

11、ace plane specified in SEMI E15 on the side of the tool where the carrier is loaded and unloaded as defined in SEMI E57 4 1 7 frame seal zone a surface on the exterior side of the frame of the port door for sealing to the frame of the box door 1 ISO Central Secretariat 1 rue de Varemb C P 56 CH 1211

12、 Gen ve 20 Switzerland available in the U S from American National Standards Institute 11 West 42nd Street 13th Floor New York NY 10036 SEMI E62 0301 SEMI 1997 20012 4 1 8 horizontal datum plane a horizontal plane from which projects the kinematic coupling pins on which the carrier sits On tool load

13、 ports it is at the load height specified in SEMI E15 and might not be physically realized as a surface as defined in SEMI E57 4 1 9 load face plane the furthest physical vertical boundary plane from the cassette centroid or carrier centroid on the side or sides of the tool where loading of the tool

14、 is intended as defined in SEMI E15 4 1 10 minienvironment a localized environment created by an enclosure to isolate the product from contamination and people as defined in SEMI E44 4 1 11 pod a box having a Standard Mechanical Interface SMIF per SEMI E19 as defined in SEMI E44 4 1 12 wafer carrier

15、 any cassette box pod or boat that contains wafers as defined in SEMI E15 5 Requirements 5 1 Datum Planes The physical alignment mechanism from the box to the tool load port consists of features not specified in this standard on the box that mate with three or six pins underneath as defined in SEMI

16、E57 Most of the dimensions of the interface from the box to the tool load port are determined with respect to the three orthogonal datum planes defined in that standard the horizontal datum plane the facial datum plane and the bilateral datum plane However the dimensions in this standard do not appl

17、y when the box is placed on the load port but rather when the box has been moved horizontally into place against the front opening interface Otherwise the front opening interface would interfere with the kinematic coupling during loading and the minimum rear clearance in E15 would be violated 5 2 Sy

18、mmetry All of the dimensions for the interface are bilaterally symmetric about the bilateral datum plane and about a plane z30 above the horizontal datum plane with the following exceptions as viewed by a person standing in front of the tool and facing the interface The registration pins are in the

19、lower right and upper left quadrants of the port door The areas reserved for purge ports are in the upper right and lower left quadrants of the port door Both latch keys turn 90 counter clockwise from vertical to unlatch the box door from the box 5 3 Door Alignment Maintenance Mechanism The two regi

20、stration pins that are used to limit the maximum displacement of the box door while on the port door are shown in Figures 1 and 2 and specified in Table 1 The over all surface finish of the registration pins must have a final roughness height less than or equal to r47 The registration pins are surro

21、unded by reserved space for optional vacuum application 5 4 Purge Ports Opposite the registration pins are reserved areas for optional purge ports not yet specified where inert gases may be pumped into and out of the box 5 5 Locking Mechanism The box door is locked and unlocked by a set of two 13 5

22、mm by 5 mm heads on shafts that have a 5 mm diameter These latch keys must unlatch the box door from the box by rotating counter clockwise to horizontal and must latch the box door to the box by rotating clockwise to vertical as viewed by a person standing in front of the tool facing the interface T

23、he latch keys must not rotate beyond these limits of the rotation angle To allow seal compression by latches the torque delivered by the port to turn the latch keys must be at least f30 Thus it is recommended that no box door be designed that needs more torque than this Figure 3 shows front side and

24、 top views of the latch keys In addition to the dimensions shown in Figure 3 and Table 1 all required convex features on the latch keys must have a blend radius of r41 to prevent small contact patches with large stresses that might cause wear and particles The over all surface finish of the latch ke

25、ys must have a final roughness height less than or equal to r47 5 6 Seal Zones On the exterior side of the port at a distance y33 from carrier facial datum plane must be two areas for sealing to the box It is recommended that boxes be designed with flat areas opposite these seal zones The door seal

26、zone must be just inside the rim of the port door in the area between x32 and x33 from the facial datum plane and between z32 and z33 from the vertical center line of the port which is z30 above the facial datum plane Similarly the frame seal zone must be on the frame of the port door in the area be

27、tween x34 and x35 from the facial datum plane and between z34 and z35 from the vertical center line of the port The inner seal zone should be no closer to and not more than y34 farther from the facial datum plane than the point on the outer seal zone nearest the facial datum plane The port door open

28、ing must be no smaller than the inner edge of the frame seal zone defined by x34 z34 and r34 5 7 Inner and Outer Radii All required concave features may have a radius of up to r45 to allow cleaning and to prevent contaminant build up All required convex features may also have a radius of up to r46 t

29、o prevent small contact patches with large stresses that might cause wear and particles Note that SEMI E62 0301 SEMI 1997 20013 these limits on the radius of all required features are specified as a maximum not a minimum to ensure that the required features are not rounded off too much The lower bou

30、nd on the radius is up to the interface supplier Note also that this radius applies to every required feature unless another radius is called out specifically 5 8 Force Between Box and Port It is recommended that the box be pressed to the FIMS interface with a force no greater than f33 It is recomme

31、nded that the force be as small as possible z32 84 5 144 5 106 166 z33 93 5 153 5 115 175 0 25 z34 95 5 155 5 117 177 0 25 z35 104 5 164 5 126 186 z31 45 105 66 5 126 5 0 1 x32 173 5 180 z30 106 5 166 5 128 188 bilateral datum plane load port horizontal datum plane numbers in parentheses are for 25

32、wafer boxes if different numbers in square brackets are for boxes with removable cassettes if different latch key r32 10 r33 21 0 25 r34 23 0 25 r35 30 x30 129 0 1 registration pinspurge ports optional x31 70 0 1 x33 182 5 189 0 25 x34 184 5 191 0 25 x35 193 5 200 r39 12 5 d31 9 0 02 r38 27 5 Figure

33、 1 Dimensions for Front Opening Interface SEMI E62 0301 SEMI 1997 20014 y30 165 except at registration pins latch keys and purge ports y33 165 5 0 5 to both seal areas y31 7 5 to origin of r30 y32 11 0 1 z31 45 105 66 5 126 5 0 1 bilateral datum plane center line of the port z30 above the horizontal

34、 datum plane x31 70 0 1 facial datum plane y34 0 0 25 between seal areas d31 9 0 02 frame seal area door seal area r30 5 0 5 r40 0 4 0 1 blend radius numbers in parentheses are for 25 wafer boxes if different numbers in square brackets are for boxes with removable cassettes if different Figure 2 Reg

35、istration Pin Dimensions SEMI E62 0301 SEMI 1997 20015 position when door is latched to box 90 1 position when door is unlatched from box 0 1 numbers in parentheses are for 25 wafer boxes if different numbers in square brackets are for boxes with removable cassettes if different y37 3 5 0 1 y36 7 0

36、1 z30 106 5 166 5 128 188 d37 5 0 2 bilateral datum plane load port horizontal datum plane r36 6 75 0 1 x36 2 5 0 1 x30 129 0 1 y30 165 except at registration pins latch keys and purge ports y33 165 5 0 5 to both seal zones facial datum plane y34 0 0 25 between seal zones frame seal zone door seal z

37、one r41 1 5 0 5 blend radius at all convex features Figure 3 Latch Key Dimensions Table 1 Dimensions for Front Opening Interface Mechanical Specification FIMS Symbol Used Value SpecifiedDatum Measured fromFeature Measured to 0 1 to unlatch the box door from the box 90 1 to latch the box door to the

38、box horizontal datum planeclockwise rotation of latch key d319 0 02 mm 0 3543 0 0008 in diameter centered on the intersection of x31 and z31 surface of registration pin shaft d375 0 2 mm 0 197 0 008 in diameter centered on the intersection of x30 and z30 surface of latch key shaft f301 7 N m 15 in l

39、bf minimumnot applicabletorque delivered by the port to turn the latch keys f339 N 2 lbf maximumnot applicablerecommended force with which the box is pressed to the FIMS interface f349 N 2 lbf maximumnot applicablerecommended force with which the port presses the box door into the box r305 0 5 mm 0

40、20 0 02 in intersection of x31 y31 and z31shoulder of registration pin r3210 mm 0 39 in minimumnot applicableinside corner of door seal zone SEMI E62 0301 SEMI 1997 20016 Symbol Used Value SpecifiedDatum Measured fromFeature Measured to r3321 0 25 mm 0 827 0 010 in not applicableoutside corner of do

41、or seal zone r3423 0 25 mm 0 906 0 010 in not applicableinside corner of frame seal zone r3530 mm 1 18 in maximumnot applicableoutside corner of frame seal zone r366 75 0 1 mm 0 266 0 004 in intersection of x30 and z30ends of latch key head r3827 5 mm 1 08 in minimumintersection of x31 and z31bounda

42、ry of vacuum application zone around registration pin r3912 5 mm 0 49 in minimumintersection of x31 and z31boundary of reserved area for purge ports r400 4 0 1 mm 0 016 0 004 in not applicableblend at intersection of r30 with r31 and y32 r411 5 0 5 mm 0 059 0 020 in not applicableblend at convex fea

43、tures on latch keys r451 mm 0 04 in maximumnot applicableall concave features radius r462 mm 0 08 in maximumnot applicableall required convex features radius r470 80 m 32 in maximum Roughness Ra as defined in ISO 4287 not applicablesurface finish of the registration pins and latch keys x30129 0 1 mm

44、 5 08 0 004 in bilateral datum planecenter line of latch key rotation x3170 0 1 mm 2 756 0 004 in bilateral datum planecenter of registration pins and purge port areas x32173 5 mm 6 83 in maximum for nonremovable cassette and 180 mm 7 09 in maximum for removable cassette bilateral datum planeinside

45、edge of door seal zone x33182 5 0 25 mm 7 185 0 010 in for nonremovable cassette and 189 0 25 mm 7 441 0 010 in for removable cassette bilateral datum planeoutside edge of door seal zone x34184 5 0 25 mm 7 264 0 010 in for nonremovable cassette and 191 0 25 mm 7 520 0 010 in for removable cassette b

46、ilateral datum planeinside edge of frame seal zone x35193 5 mm 7 62 in minimum for nonremovable cassette and 200 mm 7 87 in minimum for removable cassette bilateral datum planeoutside edge of frame seal zone x362 5 0 1 mm 0 098 0 004 in x30 from bilateral datum planeside of latch key head x37 0 2 mm

47、 0 008 in position of the load port door before opening position of the load port door after closing SEMI E62 0301 SEMI 1997 20017 Symbol Used Value SpecifiedDatum Measured fromFeature Measured to y30165 mm 6 50 in minimumfacial datum planeentire interface except latch key registration pins and purg

48、e ports y317 5 mm 0 30 in point on door seal zone closest to facial datum plane origin of r30 shoulder radius on registration pin y3211 0 0 1 mm 0 43 0 004 in point on door seal zone closest to facial datum plane end of registration pin y33165 5 0 5 mm 6 52 0 02 in facial datum planesurface of seal

49、zones y340 0 25 mm 0 0 01 in point on frame seal zone closest to facial datum plane surface of door seal zone y367 0 0 1 mm 0 28 0 004 in point on door seal zone closest to facial datum plane far side of latch key head y373 5 0 1 mm 0 14 0 004 in point on door seal zone closest to facial datum plane

50、 near side of latch key head z30106 5 0 mm 4 19 0 in for nonremovable 13 wafer cassette and 166 5 0 mm 6 56 0 in for nonremovable 25 wafer cassette and 128 0 mm 5 04 0 in for removable 13 wafer cassette and 188 0 mm 7 40 0 in for removable 25 wafer cassette horizontal datum planevertical center line