SEMI E15.1-0600 SPECIFICATION FOR 300 mm TOOL LOAD PORT

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1、SEMI E15 1 0600 SEMI 1996 20001 SEMI E15 1 0600 SPECIFICATION FOR 300 mm TOOL LOAD PORT This specification was technically approved by the Global Physical Interfaces to be published June 2000 Originally published in 1996 previously published February 2000 1 Purpose 1 1 This specification defines dim

2、ensional require ments for the load ports of 300 mm wafer process and inspection equipment It is intended to promote a uniform physical interface between equipment and the factory to facilitate the use of automated wafer carrier transport systems and or to meet ergonomic require ments for manually l

3、oaded equipment 2 Scope 2 1 This standard covers 300 mm equipment only Similar requirements covering equipment for 200 mm wafers and smaller are covered in SEMI E15 2 2 This standard does not purport to address safety issues if any associated with its use It is the responsi bility of the users of th

4、is standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 3 Limitations 3 1 This standard is not met by direct loading unloading of vacuum load locks Requirements of such interfaces may differ from those in this document 4

5、 Referenced Standards 4 1 SEMI Standards SEMI E1 9 Provisional Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E19 5 Specification for 300 mm Bottom Opening Standard Mechanical Interface SMIF SEMI E47 1 Provisional Mecha

6、nical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers SEMI E57 Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers SEMI E62 Provisional Specification for 300 mm Front Opening Interface Mechanical Standard FIMS SEMI E84 Specifica

7、tion for Enhanced Carrier Handoff Parallel I O Interface NOTE 1 As listed or revised all documents cited shall be the latest publications of adopted standards 5 Terminology See SEMI E15 6 Ordering Information 6 1 Per Section 6 of SEMI E15 except for Sections 6 1 3 and 6 1 4 Also the user must specif

8、y which of the three options defined in Section 7 5 is required for each load port and whether a cover is needed over the exclusion volume for photo coupled I O interfaces defined in Section 7 8 7 Requirements 7 1 The dimensional requirements for the load port of a tool are given in Table 1 with ref

9、erence to the figures in this document Although the carrier transport systems shown in these figures appear similar to overhead monorails they are intended to represent any type of transport system AGV PGV conveyor overhead track etc 7 2 The dimensional requirements for the placement of a wafer carr

10、ier on the load port are given in Table 1 with reference to the figures of this document The carriers shown in these figures are intended to represent any type of carrier cassette or box 7 3 The wafers are to be oriented horizontally face up with zero nominal tilt at the time they are placed on the

11、load port The tolerance in the horizontal plane is determined by the registration and alignment feature between the carrier and the load port as specified in SEMI E57 7 3 1 The carrier shall be loaded and unloaded with its front parallel to and away from the load face plane see Figure 1 7 4 Dimensio

12、n H is nominally 900 mm fully adjust able at installation over the range of 890 to 910 mm The precision with which the load port height must be maintained is dictated by the needs of the carrier delivery system SEMI E15 1 0600 SEMI 1996 20002 7 5 As shown in Figure 3 the maximum allowable height of

13、an obstruction on the load port over which the carrier must be lifted before being set down on the kinematic couplings is H1 Examples of such obstruct ions include alignment devices and identification tag readers as well as the kinematic couplings themselves Below H1 above the horizontal datum plane

14、 clearances C1 and C2 no longer apply 7 5 1 Two exclusion volumes on the left and right side of the load port must also be kept clear so that fork lifts or conveyors may be used Each exclusion volume ex tends from the load face plane to D0 beyond the facial datum plane and extends H0 below the horiz

15、ontal da tum plane between W1 and W2 from the bilateral da tum plane Although the carrier shown in Figure 3 is an open cassette these exclusion volumes are also required on load ports that are configured with a FIMS interface conforming to SEMI E62 for front opening boxes However these exclusion vol

16、umes are not required on load ports that are configured for bottom opening SMIF pods because SEMI E19 5 already defines that part of the load port 7 5 2 A load port that advances the carrier from the undocked position where the carrier is initially deli vered to the load port to the docked position

17、where the carrier is ready for wafer extraction or insertion must reserve an exclusion volume that is intended for but not limited to containing automated units that read or write to an ID tag on the rear of a carrier in the un docked position where the carrier is initially delivered to the load por

18、t This exclusion volume extends W4 to either side of the bilateral datum plane and between D3 and D4 from the facial datum plane When the load port is in the correct position to read or write to the ID tag the exclusion volume must extend from the carrier down to H3 plus H4 below the horizontal datu

19、m plane When the load port is in a different position the volume from the carrier down to H3 below the horizontal datum plane may be occupied temporarily The value of H3 is at the load port supplier s choice As a result reader writer units for this exclusion volume must fit in a space no taller than

20、 H4 no wider than 2 times W4 and no deeper than D4 minus D3 If no reader writer unit is installed the exclusion volume may be covered by a panel See Table 2 for dimensions of this exclusion volume 7 5 3 Also the load port must reserve another exclu sion volume that is intended for but not limited to

21、 containing automated units that read or write to an ID tag on the rear of a carrier in the docked position where the carrier is ready for wafer extraction or insertion In this case dimensions D3 D4 and W4 are measured with respect to the datum planes defined by the kine matic couplings in the docke

22、d position unlike all other use of datum planes in this standard The distance be tween these two sets of datum planes in the docked vs undocked position is not defined and if the carrier is rotated during the advance motion the two facial or bilateral datum planes will not be parallel At the load po

23、rt supplier s choice the reader writer unit in this ex clusion volume may be mounted either on the advance mechanism of the load port so it is very close to the carrier and it moves with the kinematic couplings or below the advance mechanism so it is farther from the carrier is stationary and may be

24、 covered temporarily by the advance mechanism Again this exclusion vol ume extends W4 to either side of the bilateral datum plane and between D3 and D4 from the facial datum plane When the load port is in the correct position to read or write to the ID tag the exclusion volume must extend from the c

25、arrier down to H3 plus H4 below the horizontal datum plane When the load port is in a different position the volume from the carrier down to H3 below the horizontal datum plane may be occupied temporarily The value of H3 is at the load port supplier s choice As a result reader writer units for this

26、exclusion volume must fit in a space no taller than H4 no wider than 2 times W4 and no deeper than D4 minus D3 If no reader writer unit is installed the exclusion volume may be covered by a panel See Table 2 for dimensions of this exclusion volume 7 5 4 A load port that is configured for open casset

27、tes with bar code ID tags on the bottom or for FOUPs with bar code ID tags on the rear must provide the appropriate exclusion volume a bar code reader defined in Table 2 7 6 As shown in Figure 2 tool load ports must conform to one of the following configuration options If no option is specified Opti

28、on 1 is assumed 7 6 1 In Option 1 the load port must nominally be at 900 mm and it must be open from above to facilitate automatic carrier delivery from an overhead transport system The open volume required for vertical delivery is defined by a projection of the tool load port area including the are

29、a required for C1 and C2 clearances projected upward to the top of the tool Note that this condition need only be met when the tool is being loaded For example the load port may be formed by a surface that extends outward during loading to provide overhead access 7 6 2 In Option 2 which allows faste

30、r automatic carrier delivery from an overhead transport system the horizontal datum plane of the load port may be at any height above H that leaves the top of the carrier under H2 but it must be open from above 7 6 3 In Option 3 which allows bulkhead mounting of tools with fan filter units at C3 the

31、 load port must SEMI E15 1 0600 SEMI 1996 20003 nominally be at 900 mm and it must have a clearance C3 above the maximum height of the carrier 7 7 Clearances C1 C2 and C3 are defined with respect to the maximum dimensions of the carrier defined in SEMI E47 1 for a box or in SEMI E1 9 for an open cas

32、sette not to the rectangular wafer carrier envelope defined in SEMI E15 To prevent interference between transport systems on the same or adjacent load ports it is recommended that floor based transport vehicles not exceed clearances C2 and C3 and over head hoist vehicles not exceed clearance C2 when

33、 picking up or placing a carrier on the load port 7 8 Dimension S specifies the recommended minimum spacing between cassette wafer carrier centroids In any case if S violates C1 then C1 prevails As shown in Figure 1 below each load port must be an exclusion volume defined by dimensions D7 D8 H7 H8 a

34、nd W8 for photo coupled I O interfaces to floor based transport vehicles This exclusion volume is centered on the bilateral datum plane but its distance behind the load face plane may vary between zero and the upper limit on D7 If no photo coupled I O interfaces unit is installed the exclusion volum

35、e may be covered by a panel If a photo coupled I O device is installed the center of its horizontal beam line must be within W9 of the bilateral datum plane and within H9 of a point H7 above the floor On each tool load ports are numbered in increasing order beginning with 1 from left to right as see

36、n by a person facing the load face plane beginning with load ports that are nominally at 900 mm Option 1 or Option 3 and then continuing from left to right with any load ports that are higher Option 2 7 9 To add clearance for overhead carrier transport no part of the tool in front of the plane defin

37、ed by C2 may be higher than H2 from the floor The volume below H2 may contain carriers stored in an internal buffer by the tool 7 10 If the tool occupies the space behind the load port and above any interface to the carrier then the front of that upper part of the tool shown as the equipment boundar

38、y in Figure 1 must be at a distance D1 from the facial datum plane This equipment boundary is parallel to the load face plane and carriers may be moved or rotated below this surface after loading 7 11 If the load port provides the option to use roller conveyors for carrier loading the conveying surf

39、ace of the rollers must be H5 above the horizontal datum plane as shown in Figure 3 at the time of carrier loading or unloading When not in use the conveyors must be lowered below H0 under the horizontal datum plane 7 12 Dimension Definitions See SEMI E15 for applicable definitions 8 Related Documen

40、ts 8 1 SEMI Standards SEMI E63 Mechanical Specification for 300 mm Box Opener Loader to Tool Standard BOLTS M Interface SEMI E64 Provisional Specification for 300 mm Cart to SEMI E15 1 Docking Interface Port SEMI E72 Specification and Guide for 300 mm Equipment Footprint Height and Weight SEMI M31 P

41、rovisional Mechanical Specification for Front Opening Shipping Box Used to Transport and Ship 300 mm Wafers NOTE 2 As listed or revised all documents cited shall be the latest publications of adopted standards Table 1 Dimensional Requirements for 300 mm Load Ports DimensionApplicationValue mm in Not

42、es C1minimum75 3 0 C2minimum30 1 2 C3minimum150 5 91 Drange250 0 10 9 8 0 0 4 D0minimum110 0 59 D1range200 10 4 7 9 0 4 0 2 D7maximum450 17 72 D8minimum30 1 18 DimensionApplicationValue mm in Notes Hnominal900 35 4 See NOTE 1 H0minimum15 5 12 SEMI E15 1 0600 SEMI 1996 20004 H1maximum25 1 0 H2maximum

43、2600 102 4 H5Range33 1 1 30 0 04 height of roller conveyors H7nominal250 9 84 center of optical beam line H8minimum50 1 97 H9maximum12 0 47 tolerance on photo coupled I O device beam line 420 16 5 open cassette SEMI E1 9 only 475 18 7 box SEMI E47 1 without manual side handlesSminimum 505 19 9 box S

44、EMI E47 1 with manual side handles W1maximum130 5 12 W2minimum205 8 07 W8minimum100 3 94 W9maximum22 0 87 tolerance on photo coupled I O device beam line NOTE 1 This value is ergonomically compatible with the proposed 13 wafer carriers and may not be ergonomically compatible with the proposed 25 waf

45、er carriers Such carriers may require assisted loading H to be fully adjustable at installation over the range of 890 to 910 mm 35 to 35 8 inches Table 2 Required Exclusion Volume Dimensions for Carrier ID Reader Writer Units Load Port Type Carrier Type See NOTE 1 FOUP SEMI E47 1 only FOUP SEMI E47

46、1 only FOUP SEMI E47 1 only open cassette SEMI E1 9 only Carrier ID Type See NOTE 1 electronic read write electronic read write bar code read only bar code read only Carrier Position See NOTE 1 dockedundockedundockednot applicable Dimension mm in mm in mm in mm in D3 or D3 D3 165 6 50 max D3 190 7 4

47、8 max D3 190 7 48 max D3 136 5 35 max D4 or D4 D4 205 8 07 min D4 235 9 25 min D4 240 9 45 min D4 230 9 06 min H30 min 75 2 95 max 15 0 59 min 36 1 42 max 0 min 0 max 0 min 0 max H4H4 30 1 18 min H4 80 3 15 min H4 80 3 15 min H4 150 5 91 min W4 or W4 W4 35 1 38 min W4 75 2 95 min W4 75 2 95 min W4 7

48、5 2 95 min NOTE 1 Automated units to read or write to an ID tag which are mounted in one of the exclusion volumes as defined by this standard are not limited to be used on load ports in the Carrier Position for the Carrier ID type or Carrier type indicated by this table SEMI E15 1 0600 SEMI 1996 200

49、05 420 open cassette 475 box without handles 505 box with handles overhead track clearance bilateral datum planes wafer centroids wafer carrier horizontal datum plane exclusion volume for parallel I O device see SEMI E84 floor equipment boundary facial datum plane wafer centroid wafer carrier front

50、load face plane docking interface see SEMI E64 H 900 H2 2600 H1 25 D 250 C2 30 C1 75 D1 200 0 10 10 4 W8 100 D7 450 H7 250 H8 50 S D8 30 Figure 1 Load Port Requirements H 900 C3 150 H2 2600 box only Option 1Option 2Option 3 reserved space for overhead transport of boxes Figure 2 Load Port Options SE